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题名:
Design and fabrication of broadband ultralow reflectivity black Si surfaces by laser micro/nanoprocessing
作者: Yang, Jing; Luo, Fangfang; Kao, Tsung Sheng; Li, Xiong; Ho, Ghim Wei; Teng, Jinghua; Luo, Xiangang; Hong, Minghui
刊名: LIGHT-SCIENCE & APPLICATIONS
出版日期: 2014
卷号: 3
学科分类: anti-reflection; broadband; laser micro/nanoprocessing; surface plasmons
DOI: 10.1038/lsa.2014.66
通讯作者: Hong, MH (reprint author), Natl Univ Singapore, Dept Elect & Comp Engn, 4 Engn Dr 3, Singapore 117576, Singapore.
文章类型: 期刊论文
中文摘要: Light collection efficiency is an important factor that affects the performance of many optical and optoelectronic devices. In these devices, the high reflectivity of interfaces can hinder efficient light collection. To minimize unwanted reflection, anti-reflection surfaces can be fabricated by micro/nanopatterning. In this paper, we investigate the fabrication of broadband anti-reflection Si surfaces by laser micro/nanoprocessing. Laser direct writing is applied to create microstructures on Si surfaces that reduce light reflection by light trapping. In addition, laser interference lithography and metal assisted chemical etching are adopted to fabricate the Si nanowire arrays. The anti-reflection performance is greatly improved by the high aspect ratio subwavelength structures, which create gradients of refractive index from the ambient air to the substrate. Furthermore, by decoration of the Si nanowires with metallic nanoparticles, surface plasmon resonance can be used to further control the broadband reflections, reducing the reflection to below 1.0% across from 300 to 1200 nm. An average reflection of 0.8% is achieved.
英文摘要: Light collection efficiency is an important factor that affects the performance of many optical and optoelectronic devices. In these devices, the high reflectivity of interfaces can hinder efficient light collection. To minimize unwanted reflection, anti-reflection surfaces can be fabricated by micro/nanopatterning. In this paper, we investigate the fabrication of broadband anti-reflection Si surfaces by laser micro/nanoprocessing. Laser direct writing is applied to create microstructures on Si surfaces that reduce light reflection by light trapping. In addition, laser interference lithography and metal assisted chemical etching are adopted to fabricate the Si nanowire arrays. The anti-reflection performance is greatly improved by the high aspect ratio subwavelength structures, which create gradients of refractive index from the ambient air to the substrate. Furthermore, by decoration of the Si nanowires with metallic nanoparticles, surface plasmon resonance can be used to further control the broadband reflections, reducing the reflection to below 1.0% across from 300 to 1200 nm. An average reflection of 0.8% is achieved.
收录类别: SCI
项目资助者: National Research Foundation ; Prime Minister's Office, Singapore under its Competitive Research Program (CRP) [NRF-CRP10-2012-04] ; Economic Development Board (SPORE) [COY-15-EWI-RCFSA/N197-1] ; Chinese Nature Science [61138002] ; 973 Program of China [2013CBA01700]
语种: 英语
WOS记录号: WOS:000345187300001
ISSN号: 2047-7538
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/6847
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作者单位: 1.[Yang, Jing
2.Luo, Fangfang
3.Kao, Tsung Sheng
4.Ho, Ghim Wei
5.Hong, Minghui] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 117576, Singapore
6.[Yang, Jing
7.Teng, Jinghua] Agcy Sci Technol & Res, Inst Mat Res & Engn, Singapore 117602, Singapore
8.[Yang, Jing] Natl Univ Singapore, NUS Environm Res Inst, Singapore 117411, Singapore
9.[Li, Xiong
10.Luo, Xiangang] Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China

Recommended Citation:
Yang, Jing,Luo, Fangfang,Kao, Tsung Sheng,et al. Design and fabrication of broadband ultralow reflectivity black Si surfaces by laser micro/nanoprocessing[J]. LIGHT-SCIENCE & APPLICATIONS,2014,3.
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