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A bi-directional out-of-plane actuator by electrostatic force
Ren, Hao1; Wang, Weimin2; Tao, Fenggang2; Yao, Jun2; Yao, J. (junyao@ioe.ac.cn)
Source PublicationMicromachines
Volume4Issue:4Pages:431-443
2013
Language英语
DOI10.3390/mi4040431
Indexed BySCI ; Ei
WOS IDWOS:000329707400006
Subtype期刊论文
AbstractPresented in this paper is a bi-directional out-of-plane actuator which combines the merits of the electrostatic repulsive principle and the electrostatic attractive principle. By taking advantage of the electrostatic repulsive mode, the common "pull-in" instability can be lessened to enlarge the displacement, and by applying the electrostatic attractive mode, the out-of-plane displacement is further enlarged. The implications of changing the actuator's physical dimensions are discussed, along with the two-layer polysilicon surface microfabrication process used to fabricate such an actuator. The static characteristics of the out-of-plane displacement versus the voltage of both modes are tested, and displacements of 1.4 μm and 0.63 μm are obtained at 130 V and 15 V, respectively. Therefore, a total stroke of 2.03 μm is achieved, more than 3 fold that of the electrostatic attractive mode, making this actuator useful in optical Micro-Electro-Mechanical Systems (MEMS) and Radio Frequency (RF) MEMS applications. © 2013 by the authors; licensee MDPI, Basel, Switzerland.; Presented in this paper is a bi-directional out-of-plane actuator which combines the merits of the electrostatic repulsive principle and the electrostatic attractive principle. By taking advantage of the electrostatic repulsive mode, the common "pull-in" instability can be lessened to enlarge the displacement, and by applying the electrostatic attractive mode, the out-of-plane displacement is further enlarged. The implications of changing the actuator's physical dimensions are discussed, along with the two-layer polysilicon surface microfabrication process used to fabricate such an actuator. The static characteristics of the out-of-plane displacement versus the voltage of both modes are tested, and displacements of 1.4 μm and 0.63 μm are obtained at 130 V and 15 V, respectively. Therefore, a total stroke of 2.03 μm is achieved, more than 3 fold that of the electrostatic attractive mode, making this actuator useful in optical Micro-Electro-Mechanical Systems (MEMS) and Radio Frequency (RF) MEMS applications. © 2013 by the authors; licensee MDPI, Basel, Switzerland.
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Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/6832
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding AuthorYao, J. (junyao@ioe.ac.cn)
Affiliation1. School of Electrical Computer and Energy Engineering, Arizona State University, Tempe, AZ 85287, United States
2. State Key Lab of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
Recommended Citation
GB/T 7714
Ren, Hao,Wang, Weimin,Tao, Fenggang,et al. A bi-directional out-of-plane actuator by electrostatic force[J]. Micromachines,2013,4(4):431-443.
APA Ren, Hao,Wang, Weimin,Tao, Fenggang,Yao, Jun,&Yao, J. .(2013).A bi-directional out-of-plane actuator by electrostatic force.Micromachines,4(4),431-443.
MLA Ren, Hao,et al."A bi-directional out-of-plane actuator by electrostatic force".Micromachines 4.4(2013):431-443.
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