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题名:
A bi-directional out-of-plane actuator by electrostatic force
作者: Ren, Hao1; Wang, Weimin2; Tao, Fenggang2; Yao, Jun2
刊名: Micromachines
出版日期: 2013
卷号: 4, 期号:4, 页码:431-443
学科分类: Actuators - Adaptive optics - Electrostatic force - MEMS - Microfabrication
DOI: 10.3390/mi4040431
通讯作者: Yao, J. (junyao@ioe.ac.cn)
文章类型: 期刊论文
中文摘要: Presented in this paper is a bi-directional out-of-plane actuator which combines the merits of the electrostatic repulsive principle and the electrostatic attractive principle. By taking advantage of the electrostatic repulsive mode, the common "pull-in" instability can be lessened to enlarge the displacement, and by applying the electrostatic attractive mode, the out-of-plane displacement is further enlarged. The implications of changing the actuator's physical dimensions are discussed, along with the two-layer polysilicon surface microfabrication process used to fabricate such an actuator. The static characteristics of the out-of-plane displacement versus the voltage of both modes are tested, and displacements of 1.4 μm and 0.63 μm are obtained at 130 V and 15 V, respectively. Therefore, a total stroke of 2.03 μm is achieved, more than 3 fold that of the electrostatic attractive mode, making this actuator useful in optical Micro-Electro-Mechanical Systems (MEMS) and Radio Frequency (RF) MEMS applications. © 2013 by the authors; licensee MDPI, Basel, Switzerland.
英文摘要: Presented in this paper is a bi-directional out-of-plane actuator which combines the merits of the electrostatic repulsive principle and the electrostatic attractive principle. By taking advantage of the electrostatic repulsive mode, the common "pull-in" instability can be lessened to enlarge the displacement, and by applying the electrostatic attractive mode, the out-of-plane displacement is further enlarged. The implications of changing the actuator's physical dimensions are discussed, along with the two-layer polysilicon surface microfabrication process used to fabricate such an actuator. The static characteristics of the out-of-plane displacement versus the voltage of both modes are tested, and displacements of 1.4 μm and 0.63 μm are obtained at 130 V and 15 V, respectively. Therefore, a total stroke of 2.03 μm is achieved, more than 3 fold that of the electrostatic attractive mode, making this actuator useful in optical Micro-Electro-Mechanical Systems (MEMS) and Radio Frequency (RF) MEMS applications. © 2013 by the authors; licensee MDPI, Basel, Switzerland.
收录类别: SCI ; Ei
项目资助者: National Special Fund for the Development of Major Research Equipment and Instrument [2011YQ03012407] ; National Natural Science Foundation of China-NSAF [11176033]
语种: 英语
WOS记录号: WOS:000329707400006
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/6832
Appears in Collections:微细加工光学技术国家重点实验室(开放室)_期刊论文

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作者单位: 1. School of Electrical Computer and Energy Engineering, Arizona State University, Tempe, AZ 85287, United States
2. State Key Lab of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China

Recommended Citation:
Ren, Hao,Wang, Weimin,Tao, Fenggang,et al. A bi-directional out-of-plane actuator by electrostatic force[J]. Micromachines,2013,4(4):431-443.
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