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Design and Theoretical Analyses of Tip-Insulator-Metal Structure with Bottom-Up Light Illumination: Formations of Elongated Symmetrical Plasmonic Hot Spot at Sub-10 nm Resolution
Zhou, Jie; Wang, Changtao; Zhao, Zeyu; Wang, Yanqin; He, Jiayu; Tao, Xing; Luo, Xiangang; Luo, XG (reprint author), Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Nanofabricat & Microeng, POB 350, Chengdu 610209, Peoples R China.
Source PublicationPLASMONICS
Volume8Issue:2Pages:1073-1078
2013
Language英语
ISSN1557-1955
DOI10.1007/s11468-013-9511-4
Indexed BySCI
WOS IDWOS:000320445700119
Subtype期刊论文
AbstractAg tip-insulator-metal structure with bottom-up light illumination is proposed and theoretically analyzed. It shows that there is a strong plasmonic coupling between Ag tip and metallic surface. Different from oblique light illumination, this novel design possesses unique advantages of symmetrical hot spot profile and enlarged depth of focus at a sub-10-nm spatial resolution. Influences of tip size, insulator, and metallic layer thickness are studied. It is found that the metallic layer thickness greatly affects the plasmonic hot spot quality. Meanwhile, the thickness of photoresist plays a major role in controlling light spot size, indicating that much higher resolution can be achieved for the Ag tips with large curvature radius.; Ag tip-insulator-metal structure with bottom-up light illumination is proposed and theoretically analyzed. It shows that there is a strong plasmonic coupling between Ag tip and metallic surface. Different from oblique light illumination, this novel design possesses unique advantages of symmetrical hot spot profile and enlarged depth of focus at a sub-10-nm spatial resolution. Influences of tip size, insulator, and metallic layer thickness are studied. It is found that the metallic layer thickness greatly affects the plasmonic hot spot quality. Meanwhile, the thickness of photoresist plays a major role in controlling light spot size, indicating that much higher resolution can be achieved for the Ag tips with large curvature radius.
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Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/6831
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding AuthorLuo, XG (reprint author), Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Nanofabricat & Microeng, POB 350, Chengdu 610209, Peoples R China.
Affiliation1.[Zhou, Jie
2.Wang, Changtao
3.Zhao, Zeyu
4.Wang, Yanqin
5.He, Jiayu
6.Tao, Xing
7.Luo, Xiangang] Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Nanofabricat & Microeng, Chengdu 610209, Peoples R China
Recommended Citation
GB/T 7714
Zhou, Jie,Wang, Changtao,Zhao, Zeyu,et al. Design and Theoretical Analyses of Tip-Insulator-Metal Structure with Bottom-Up Light Illumination: Formations of Elongated Symmetrical Plasmonic Hot Spot at Sub-10 nm Resolution[J]. PLASMONICS,2013,8(2):1073-1078.
APA Zhou, Jie.,Wang, Changtao.,Zhao, Zeyu.,Wang, Yanqin.,He, Jiayu.,...&Luo, XG .(2013).Design and Theoretical Analyses of Tip-Insulator-Metal Structure with Bottom-Up Light Illumination: Formations of Elongated Symmetrical Plasmonic Hot Spot at Sub-10 nm Resolution.PLASMONICS,8(2),1073-1078.
MLA Zhou, Jie,et al."Design and Theoretical Analyses of Tip-Insulator-Metal Structure with Bottom-Up Light Illumination: Formations of Elongated Symmetrical Plasmonic Hot Spot at Sub-10 nm Resolution".PLASMONICS 8.2(2013):1073-1078.
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