中国科学院光电技术研究所机构知识库
Advanced  
IOE OpenIR  > 微细加工光学技术国家重点实验室(开放室)  > 期刊论文
题名:
Subwavelength Demagnification Imaging and Lithography Using Hyperlens with a Plasmonic Reflector Layer
作者: Ren, Guowei; Wang, Changtao; Yi, Guangwei; Tao, Xing; Luo, Xiangang
刊名: PLASMONICS
出版日期: 2013
卷号: 8, 期号:2, 页码:1065-1072
学科分类: Multilayers; Subwavelength structures; Metamaterials; Plasmonics
DOI: 10.1007/s11468-013-9510-5
通讯作者: Luo, XG (reprint author), Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Nanofabricat & Microeng, POB 350, Chengdu 610209, Peoples R China.
文章类型: 期刊论文
中文摘要: Unlike the case in magnification mode, it is found that hyperlens employed in demagnification and lithography manner encounters great degradation of imaging quality especially for high-resolution image features. This problem mainly arises from the transversal magnetic polarization feature of light which delivers reduced contrast of electronic components intensity profile at the imaging region. Hyperlens with plasmonic reflector layer is designed for subwavelength demagnification imaging and photolithography. Analytical equations and numerical simulations show amplification of reflected evanescent waves in photoresist sandwiched by hyperlens and plasmonic reflectors in cylindrical geometry. The image quality features including resolution, contrast, and intensity can be improved significantly. Also presented are the dependence and influence of geometry parameters on imaging quality. Numerical demonstrations are given with about 15 nm half-pitch resolution imaging at illuminating wavelength of 365 nm.
英文摘要: Unlike the case in magnification mode, it is found that hyperlens employed in demagnification and lithography manner encounters great degradation of imaging quality especially for high-resolution image features. This problem mainly arises from the transversal magnetic polarization feature of light which delivers reduced contrast of electronic components intensity profile at the imaging region. Hyperlens with plasmonic reflector layer is designed for subwavelength demagnification imaging and photolithography. Analytical equations and numerical simulations show amplification of reflected evanescent waves in photoresist sandwiched by hyperlens and plasmonic reflectors in cylindrical geometry. The image quality features including resolution, contrast, and intensity can be improved significantly. Also presented are the dependence and influence of geometry parameters on imaging quality. Numerical demonstrations are given with about 15 nm half-pitch resolution imaging at illuminating wavelength of 365 nm.
收录类别: SCI
项目资助者: 973 Program of China [2011CB301800] ; Chinese Nature Science Grant [61138002, 61177013]
语种: 英语
WOS记录号: WOS:000320445700118
ISSN号: 1557-1955
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/6830
Appears in Collections:微细加工光学技术国家重点实验室(开放室)_期刊论文

Files in This Item:
File Name/ File Size Content Type Version Access License
2013-2126.pdf(909KB)期刊论文作者接受稿开放获取View 联系获取全文

作者单位: 1.[Ren, Guowei
2.Wang, Changtao
3.Yi, Guangwei
4.Tao, Xing
5.Luo, Xiangang] Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Nanofabricat & Microeng, Chengdu 610209, Peoples R China

Recommended Citation:
Ren, Guowei,Wang, Changtao,Yi, Guangwei,et al. Subwavelength Demagnification Imaging and Lithography Using Hyperlens with a Plasmonic Reflector Layer[J]. PLASMONICS,2013,8(2):1065-1072.
Service
Recommend this item
Sava as my favorate item
Show this item's statistics
Export Endnote File
Google Scholar
Similar articles in Google Scholar
[Ren, Guowei]'s Articles
[Wang, Changtao]'s Articles
[Yi, Guangwei]'s Articles
CSDL cross search
Similar articles in CSDL Cross Search
[Ren, Guowei]‘s Articles
[Wang, Changtao]‘s Articles
[Yi, Guangwei]‘s Articles
Related Copyright Policies
Null
Social Bookmarking
Add to CiteULike Add to Connotea Add to Del.icio.us Add to Digg Add to Reddit
文件名: 2013-2126.pdf
格式: Adobe PDF
所有评论 (0)
暂无评论
 
评注功能仅针对注册用户开放,请您登录
您对该条目有什么异议,请填写以下表单,管理员会尽快联系您。
内 容:
Email:  *
单位:
验证码:   刷新
您在IR的使用过程中有什么好的想法或者建议可以反馈给我们。
标 题:
 *
内 容:
Email:  *
验证码:   刷新

Items in IR are protected by copyright, with all rights reserved, unless otherwise indicated.

 

 

Valid XHTML 1.0!
Copyright © 2007-2016  中国科学院光电技术研究所 - Feedback
Powered by CSpace