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Deep sub-wavelength imaging lithography by a reflective plasmonic slab
Wang, Changtao; Gao, Ping; Zhao, Zeyu; Yao, Na; Wang, Yanqin; Liu, Ling; Liu, Kaipeng; Luo, Xiangang
Source PublicationOptics Express
Volume21Issue:18Pages:20683-20691
2013
Language英语
DOI10.1364/OE.21.020683
Indexed BySCI ; Ei
WOS IDWOS:000324867100034
Subtype期刊论文
AbstractBy utilizing a reflective plasmonic slab, it is demonstrated numerically and experimentally in this paper deep sub-wavelength imaging lithography for nano characters with about 50nm line width and dense lines with 32nm half pitch resolution (about 1/12 wavelength). Compared with the control experiment without reflective plasmonic slab, resolution and fidelity of imaged resist patterns are remarkably improved especially for isolated nano features. Further numerical simulations show that near field optical proximity corrections help to improve imaging fidelity of two dimensional nano patterns. ©2013 Optical Society of America.; By utilizing a reflective plasmonic slab, it is demonstrated numerically and experimentally in this paper deep sub-wavelength imaging lithography for nano characters with about 50nm line width and dense lines with 32nm half pitch resolution (about 1/12 wavelength). Compared with the control experiment without reflective plasmonic slab, resolution and fidelity of imaged resist patterns are remarkably improved especially for isolated nano features. Further numerical simulations show that near field optical proximity corrections help to improve imaging fidelity of two dimensional nano patterns. ©2013 Optical Society of America.
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Cited Times:47[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/6826
Collection微细加工光学技术国家重点实验室(开放室)
Affiliation State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O.box 350, Chengdu 610209, China
Recommended Citation
GB/T 7714
Wang, Changtao,Gao, Ping,Zhao, Zeyu,et al. Deep sub-wavelength imaging lithography by a reflective plasmonic slab[J]. Optics Express,2013,21(18):20683-20691.
APA Wang, Changtao.,Gao, Ping.,Zhao, Zeyu.,Yao, Na.,Wang, Yanqin.,...&Luo, Xiangang.(2013).Deep sub-wavelength imaging lithography by a reflective plasmonic slab.Optics Express,21(18),20683-20691.
MLA Wang, Changtao,et al."Deep sub-wavelength imaging lithography by a reflective plasmonic slab".Optics Express 21.18(2013):20683-20691.
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