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MEMS运动件的芯片外机械驱动方法
王皓; 姚汉民; 杜春雷
Source Publication微纳电子技术
Volume40Issue:(7/8)Pages:477~480
2003
Language中文
ISSN1671-4776
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/682
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding Author王皓
Recommended Citation
GB/T 7714
王皓,姚汉民,杜春雷. MEMS运动件的芯片外机械驱动方法[J]. 微纳电子技术,2003,40((7/8)):477~480.
APA 王皓,姚汉民,&杜春雷.(2003).MEMS运动件的芯片外机械驱动方法.微纳电子技术,40((7/8)),477~480.
MLA 王皓,et al."MEMS运动件的芯片外机械驱动方法".微纳电子技术 40.(7/8)(2003):477~480.
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