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Novel electrostatic bidirectional-translation MEMS deformable mirror
Yao, Jun1; Tao, Feng-Gang1,2; Ren, Hao1,2; Wang, Wei-Min1,2; Zhuang, Xu-Ye1; Tao, F.-G. (tfg86@mail.ustc.edu.cn)
Source PublicationNami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering
Volume10Issue:4Pages:313-317
2012
Language英语
ISSN16726030
Indexed ByEi
Subtype期刊论文
AbstractA novel electrostatic micro-electro-mechanical-system (MEMS) deformable mirror with the ability of bidirectional translation was presented. The micro mirror consisted of three parts: a central bottom electrode, four electrostatic lever-actuators and an upper electrode, i.e. a mirror plate. The mirror can operate in upward and downward modes. In the upward mode, the displacement of the mirror plate was amplified by using four levers; while in the downward mode, a nonlinear spring method was adopted to extend the translation range. The micro mirror was fabricated by using surface micromachining process and tested by a white light interferometer. The experimental results showed that the mirror could move upward about 1.1 μm at 31 V, and downward 1.1 μm at 6 V. The total displacement of the mirror plate reached 2.2 μm, about 3 times as large as the stroke of traditional mirrors with the same fabrication process.; A novel electrostatic micro-electro-mechanical-system (MEMS) deformable mirror with the ability of bidirectional translation was presented. The micro mirror consisted of three parts: a central bottom electrode, four electrostatic lever-actuators and an upper electrode, i.e. a mirror plate. The mirror can operate in upward and downward modes. In the upward mode, the displacement of the mirror plate was amplified by using four levers; while in the downward mode, a nonlinear spring method was adopted to extend the translation range. The micro mirror was fabricated by using surface micromachining process and tested by a white light interferometer. The experimental results showed that the mirror could move upward about 1.1 μm at 31 V, and downward 1.1 μm at 6 V. The total displacement of the mirror plate reached 2.2 μm, about 3 times as large as the stroke of traditional mirrors with the same fabrication process.
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/6798
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding AuthorTao, F.-G. (tfg86@mail.ustc.edu.cn)
Affiliation1. State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. Graduate University of Chinese Academy of Sciences, Beijing 100039, China
Recommended Citation
GB/T 7714
Yao, Jun,Tao, Feng-Gang,Ren, Hao,et al. Novel electrostatic bidirectional-translation MEMS deformable mirror[J]. Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering,2012,10(4):313-317.
APA Yao, Jun,Tao, Feng-Gang,Ren, Hao,Wang, Wei-Min,Zhuang, Xu-Ye,&Tao, F.-G. .(2012).Novel electrostatic bidirectional-translation MEMS deformable mirror.Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering,10(4),313-317.
MLA Yao, Jun,et al."Novel electrostatic bidirectional-translation MEMS deformable mirror".Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering 10.4(2012):313-317.
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