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题名:
Novel electrostatic bidirectional-translation MEMS deformable mirror
作者: Yao, Jun1; Tao, Feng-Gang1,2; Ren, Hao1,2; Wang, Wei-Min1,2; Zhuang, Xu-Ye1
刊名: Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering
出版日期: 2012
卷号: 10, 期号:4, 页码:313-317
学科分类: Actuators - Electrostatic actuators - Electrostatics - MEMS
通讯作者: Tao, F.-G. (tfg86@mail.ustc.edu.cn)
文章类型: 期刊论文
中文摘要: A novel electrostatic micro-electro-mechanical-system (MEMS) deformable mirror with the ability of bidirectional translation was presented. The micro mirror consisted of three parts: a central bottom electrode, four electrostatic lever-actuators and an upper electrode, i.e. a mirror plate. The mirror can operate in upward and downward modes. In the upward mode, the displacement of the mirror plate was amplified by using four levers; while in the downward mode, a nonlinear spring method was adopted to extend the translation range. The micro mirror was fabricated by using surface micromachining process and tested by a white light interferometer. The experimental results showed that the mirror could move upward about 1.1 μm at 31 V, and downward 1.1 μm at 6 V. The total displacement of the mirror plate reached 2.2 μm, about 3 times as large as the stroke of traditional mirrors with the same fabrication process.
英文摘要: A novel electrostatic micro-electro-mechanical-system (MEMS) deformable mirror with the ability of bidirectional translation was presented. The micro mirror consisted of three parts: a central bottom electrode, four electrostatic lever-actuators and an upper electrode, i.e. a mirror plate. The mirror can operate in upward and downward modes. In the upward mode, the displacement of the mirror plate was amplified by using four levers; while in the downward mode, a nonlinear spring method was adopted to extend the translation range. The micro mirror was fabricated by using surface micromachining process and tested by a white light interferometer. The experimental results showed that the mirror could move upward about 1.1 μm at 31 V, and downward 1.1 μm at 6 V. The total displacement of the mirror plate reached 2.2 μm, about 3 times as large as the stroke of traditional mirrors with the same fabrication process.
收录类别: Ei
语种: 英语
ISSN号: 16726030
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/6798
Appears in Collections:微细加工光学技术国家重点实验室(开放室)_期刊论文

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作者单位: 1. State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. Graduate University of Chinese Academy of Sciences, Beijing 100039, China

Recommended Citation:
Yao, Jun,Tao, Feng-Gang,Ren, Hao,et al. Novel electrostatic bidirectional-translation MEMS deformable mirror[J]. Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering,2012,10(4):313-317.
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文件名: 2012-2032.pdf
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