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题名:
A multi-electrode and pre-deformed bilayer spring structure electrostatic attractive MEMS actuator with large stroke at low actuation voltage
作者: Hu, Fangrong1; Li, Zhi1; Qian, Yixian2; Yao, Jun3; Xiong, Xianming1; Niu, Junhao1; Peng, Zhiyong1
刊名: Journal of Micromechanics and Microengineering
出版日期: 2012
卷号: 22, 期号:9, 页码:095023
学科分类: Electromechanical devices - Electrostatics - Finite element method - MEMS - Microactuators
DOI: 10.1088/0960-1317/22/9/095023
通讯作者: Hu, F. (hufangrong@sina.com)
文章类型: 期刊论文
中文摘要: This paper presents a multi-electrode and pre-deformed bilayer spring structure electrostatic attractive microelectromechanical systems (MEMS) actuator; it has large stroke at relatively low actuation voltage. Generally, electrostatic-attractive-force-based actuators have small stroke due to the instability resulted from the electrostatic pull-in phenomenon. However, in many applications, the electrostatic micro-actuator with large stroke at low voltage is more preferred. By introducing a multi-electrode and a pre-deformed bilayer spring structure, an electrostatic attractive MEMS actuator with large stroke at very low actuation voltage has been successfully demonstrated in this paper. The actuator contains a central plate with a size of 300 μm × 300 μm × 1.5 μm and it is supported by four L-shaped bilayer springs which are pre-deformed due to residual stresses. Each bilayer spring is simultaneously attracted by three adjacent fixed electrodes, and the factors affecting the electrostatic attractive force are analyzed by a finite element analysis method. The prototype of the actuator is fabricated by poly-multi-user-MEMS-process (PolyMUMP) and the static performance is tested using a white light interferometer. The measured stroke of the actuator reaches 2 μm at 13 V dc, and it shows a good agreement with the simulation. © 2012 IOP Publishing Ltd.
英文摘要: This paper presents a multi-electrode and pre-deformed bilayer spring structure electrostatic attractive microelectromechanical systems (MEMS) actuator; it has large stroke at relatively low actuation voltage. Generally, electrostatic-attractive-force-based actuators have small stroke due to the instability resulted from the electrostatic pull-in phenomenon. However, in many applications, the electrostatic micro-actuator with large stroke at low voltage is more preferred. By introducing a multi-electrode and a pre-deformed bilayer spring structure, an electrostatic attractive MEMS actuator with large stroke at very low actuation voltage has been successfully demonstrated in this paper. The actuator contains a central plate with a size of 300 μm × 300 μm × 1.5 μm and it is supported by four L-shaped bilayer springs which are pre-deformed due to residual stresses. Each bilayer spring is simultaneously attracted by three adjacent fixed electrodes, and the factors affecting the electrostatic attractive force are analyzed by a finite element analysis method. The prototype of the actuator is fabricated by poly-multi-user-MEMS-process (PolyMUMP) and the static performance is tested using a white light interferometer. The measured stroke of the actuator reaches 2 μm at 13 V dc, and it shows a good agreement with the simulation. © 2012 IOP Publishing Ltd.
收录类别: SCI ; Ei
语种: 英语
WOS记录号: WOS:000308210600033
ISSN号: 09601317
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/6793
Appears in Collections:微细加工光学技术国家重点实验室(开放室)_期刊论文

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作者单位: 1. College of Electronic Engineering and Automatization, Guilin University of Electronic Technology, Guilin 541004, China
2. Institute of Information Optics, Zhejiang Normal University, Jinhua 321004, China
3. State Key Lab. of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China

Recommended Citation:
Hu, Fangrong,Li, Zhi,Qian, Yixian,et al. A multi-electrode and pre-deformed bilayer spring structure electrostatic attractive MEMS actuator with large stroke at low actuation voltage[J]. Journal of Micromechanics and Microengineering,2012,22(9):095023.
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