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A multi-electrode and pre-deformed bilayer spring structure electrostatic attractive MEMS actuator with large stroke at low actuation voltage
Hu, Fangrong1; Li, Zhi1; Qian, Yixian2; Yao, Jun3; Xiong, Xianming1; Niu, Junhao1; Peng, Zhiyong1; Hu, F. (hufangrong@sina.com)
Source PublicationJournal of Micromechanics and Microengineering
Volume22Issue:9Pages:095023
2012
Language英语
ISSN09601317
DOI10.1088/0960-1317/22/9/095023
Indexed BySCI ; Ei
WOS IDWOS:000308210600033
Subtype期刊论文
AbstractThis paper presents a multi-electrode and pre-deformed bilayer spring structure electrostatic attractive microelectromechanical systems (MEMS) actuator; it has large stroke at relatively low actuation voltage. Generally, electrostatic-attractive-force-based actuators have small stroke due to the instability resulted from the electrostatic pull-in phenomenon. However, in many applications, the electrostatic micro-actuator with large stroke at low voltage is more preferred. By introducing a multi-electrode and a pre-deformed bilayer spring structure, an electrostatic attractive MEMS actuator with large stroke at very low actuation voltage has been successfully demonstrated in this paper. The actuator contains a central plate with a size of 300 μm × 300 μm × 1.5 μm and it is supported by four L-shaped bilayer springs which are pre-deformed due to residual stresses. Each bilayer spring is simultaneously attracted by three adjacent fixed electrodes, and the factors affecting the electrostatic attractive force are analyzed by a finite element analysis method. The prototype of the actuator is fabricated by poly-multi-user-MEMS-process (PolyMUMP) and the static performance is tested using a white light interferometer. The measured stroke of the actuator reaches 2 μm at 13 V dc, and it shows a good agreement with the simulation. © 2012 IOP Publishing Ltd.; This paper presents a multi-electrode and pre-deformed bilayer spring structure electrostatic attractive microelectromechanical systems (MEMS) actuator; it has large stroke at relatively low actuation voltage. Generally, electrostatic-attractive-force-based actuators have small stroke due to the instability resulted from the electrostatic pull-in phenomenon. However, in many applications, the electrostatic micro-actuator with large stroke at low voltage is more preferred. By introducing a multi-electrode and a pre-deformed bilayer spring structure, an electrostatic attractive MEMS actuator with large stroke at very low actuation voltage has been successfully demonstrated in this paper. The actuator contains a central plate with a size of 300 μm × 300 μm × 1.5 μm and it is supported by four L-shaped bilayer springs which are pre-deformed due to residual stresses. Each bilayer spring is simultaneously attracted by three adjacent fixed electrodes, and the factors affecting the electrostatic attractive force are analyzed by a finite element analysis method. The prototype of the actuator is fabricated by poly-multi-user-MEMS-process (PolyMUMP) and the static performance is tested using a white light interferometer. The measured stroke of the actuator reaches 2 μm at 13 V dc, and it shows a good agreement with the simulation. © 2012 IOP Publishing Ltd.
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Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/6793
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding AuthorHu, F. (hufangrong@sina.com)
Affiliation1. College of Electronic Engineering and Automatization, Guilin University of Electronic Technology, Guilin 541004, China
2. Institute of Information Optics, Zhejiang Normal University, Jinhua 321004, China
3. State Key Lab. of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
Recommended Citation
GB/T 7714
Hu, Fangrong,Li, Zhi,Qian, Yixian,et al. A multi-electrode and pre-deformed bilayer spring structure electrostatic attractive MEMS actuator with large stroke at low actuation voltage[J]. Journal of Micromechanics and Microengineering,2012,22(9):095023.
APA Hu, Fangrong.,Li, Zhi.,Qian, Yixian.,Yao, Jun.,Xiong, Xianming.,...&Hu, F. .(2012).A multi-electrode and pre-deformed bilayer spring structure electrostatic attractive MEMS actuator with large stroke at low actuation voltage.Journal of Micromechanics and Microengineering,22(9),095023.
MLA Hu, Fangrong,et al."A multi-electrode and pre-deformed bilayer spring structure electrostatic attractive MEMS actuator with large stroke at low actuation voltage".Journal of Micromechanics and Microengineering 22.9(2012):095023.
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