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全息片质量对原子全息光刻再现图形的影响模拟研究
石建平; 陈旭南; 陈献忠
Source Publication微细加工技术
Issue3Pages:26~40
2003
Language中文
ISSN1003-8213
Indexed ByEi
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/679
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding Author石建平
Recommended Citation
GB/T 7714
石建平,陈旭南,陈献忠. 全息片质量对原子全息光刻再现图形的影响模拟研究[J]. 微细加工技术,2003(3):26~40.
APA 石建平,陈旭南,&陈献忠.(2003).全息片质量对原子全息光刻再现图形的影响模拟研究.微细加工技术(3),26~40.
MLA 石建平,et al."全息片质量对原子全息光刻再现图形的影响模拟研究".微细加工技术 .3(2003):26~40.
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