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非正交二维MEMS倾斜镜的研制
庄须叶; 汪为民; 陶逢刚; 姚军; 高福华
Source Publication光学精密工程
Volume19Issue:8Pages:1845-1851
2011
Language中文
Subtype期刊论文
Abstract为提高传统二维倾斜镜在非正交方向上的光转换效率,设计并加工了一种转轴非正交二维MEMS倾斜镜。倾斜镜上电极非对称地固定在基底上,通过控制上、下电极的加电方式实现倾斜镜在两个非正交轴上的偏转变形。采用三层膜的结构设计,消除了上电极应力变形对镜面平整度的影响。通过在上电极加工微小突起,减小上下电极的重叠面积,避免了倾斜镜的吸合失效;另外,上、下电极仅在其边缘处重叠,确保了静电力的有效利用。研制的倾斜镜驱动电压低,在3.5 V的电压下可实现绕水平X轴0.16°、绕倾斜Y轴0.03°的偏转,Y轴与X轴成145.37...
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/6768
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding Author庄须叶
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
庄须叶,汪为民,陶逢刚,等. 非正交二维MEMS倾斜镜的研制[J]. 光学精密工程,2011,19(8):1845-1851.
APA 庄须叶,汪为民,陶逢刚,姚军,&高福华.(2011).非正交二维MEMS倾斜镜的研制.光学精密工程,19(8),1845-1851.
MLA 庄须叶,et al."非正交二维MEMS倾斜镜的研制".光学精密工程 19.8(2011):1845-1851.
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