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静电排斥型微机电系统变形镜驱动器
胡放荣; 姚军
Source Publication红外与激光工程
Issuez
2010
Language中文
Subtype期刊论文
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/6745
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding Author胡放荣
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
胡放荣,姚军. 静电排斥型微机电系统变形镜驱动器[J]. 红外与激光工程,2010(z).
APA 胡放荣,&姚军.(2010).静电排斥型微机电系统变形镜驱动器.红外与激光工程(z).
MLA 胡放荣,et al."静电排斥型微机电系统变形镜驱动器".红外与激光工程 .z(2010).
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2010-113.pdf(2653KB)期刊论文作者接受稿开放获取CC BY-NC-SAView Application Full Text
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