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静电排斥驱动六边形MEMS微镜
胡放荣; 王爱娜; 邱传凯等
Source Publication光学学报
Issue11Pages:3082-3089
2010
Language中文
Subtype期刊论文
Abstract针对目前人眼像差哈特曼-夏克测量仪不能自动补偿人眼离焦的不足,通过分析不同调焦状态下连续采集的哈特曼-夏克光斑图像序列,构造了离焦补偿评价函数,在现有像差测量仪平台上实现了人眼像差自动离焦补偿。算法根据调焦过程中哈特曼-夏克光斑的形态变化,定义了通过光斑图像评估离焦补偿结果的评价标准,并依据评价函数确定最佳光斑图像对应的离焦补偿量,从而确保哈特曼-夏克波前传感器能准确测得离焦补偿后剩余的人眼像差。实验结果表明,本方法对杂散光噪声具有较强的稳健性,可以准确实现调焦系统的自动离焦补偿,为后续像差测量仪精密测量人眼高阶像差提供了十分重要的方法。
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/6744
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding Author胡放荣
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
胡放荣,王爱娜,邱传凯等. 静电排斥驱动六边形MEMS微镜[J]. 光学学报,2010(11):3082-3089.
APA 胡放荣,王爱娜,&邱传凯等.(2010).静电排斥驱动六边形MEMS微镜.光学学报(11),3082-3089.
MLA 胡放荣,et al."静电排斥驱动六边形MEMS微镜".光学学报 .11(2010):3082-3089.
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