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驻波透镜列阵聚焦原子束制作纳米图形的研究
陈元培; 陈旭南; 李展
Source Publication微纳电子技术
Issue8Pages:546~556
2003
Language中文
ISSN1671-4776
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/674
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding Author陈元培
Recommended Citation
GB/T 7714
陈元培,陈旭南,李展. 驻波透镜列阵聚焦原子束制作纳米图形的研究[J]. 微纳电子技术,2003(8):546~556.
APA 陈元培,陈旭南,&李展.(2003).驻波透镜列阵聚焦原子束制作纳米图形的研究.微纳电子技术(8),546~556.
MLA 陈元培,et al."驻波透镜列阵聚焦原子束制作纳米图形的研究".微纳电子技术 .8(2003):546~556.
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