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提高微细图形光刻分辨力的相移滤波技术研究
陈旭南; 石建平; 罗先刚
Source Publication光子学报
Volume32Issue:3Pages:323~326
2003
Language中文
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/672
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding Author陈旭南
Recommended Citation
GB/T 7714
陈旭南,石建平,罗先刚. 提高微细图形光刻分辨力的相移滤波技术研究[J]. 光子学报,2003,32(3):323~326.
APA 陈旭南,石建平,&罗先刚.(2003).提高微细图形光刻分辨力的相移滤波技术研究.光子学报,32(3),323~326.
MLA 陈旭南,et al."提高微细图形光刻分辨力的相移滤波技术研究".光子学报 32.3(2003):323~326.
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