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Design and fabrication of a pyramid wavefront sensor
Aina Wang; Jun Yao; Dongmei Cai; Hao Ren
Source PublicationOptical Engineering
Volume49Issue:7Pages:073401
2010
Language英语
Subtype期刊论文
AbstractA new pyramid wavefront sensor (PWFS), which utilizes a reflective pyramid mirror instead of a refractive pyramid prism at the focus of a telescope, is presented. As a key optical component in this PWFS, the pyramid mirror requires accurate microfabrication for excellent quality of the tip, the turned edges, and the surfaces. The moving mask lithography process is proposed for its economic, simple, and precise control to make the cross-sectional shape of the structure. The completed pyramid mirror has a square base of 1-mm length and four side facets inclined to the base at 3.7 deg. The sizes of the pyramid tip and turned edges are both about 6 mu m, which show excellent aspects of sharpening-tip and knife-edges. The root mean square of four facets is approximately 70 nm, and the maximum profile deviation is 0.2 mu m.; A new pyramid wavefront sensor (PWFS), which utilizes a reflective pyramid mirror instead of a refractive pyramid prism at the focus of a telescope, is presented. As a key optical component in this PWFS, the pyramid mirror requires accurate microfabrication for excellent quality of the tip, the turned edges, and the surfaces. The moving mask lithography process is proposed for its economic, simple, and precise control to make the cross-sectional shape of the structure. The completed pyramid mirror has a square base of 1-mm length and four side facets inclined to the base at 3.7 deg. The sizes of the pyramid tip and turned edges are both about 6 mu m, which show excellent aspects of sharpening-tip and knife-edges. The root mean square of four facets is approximately 70 nm, and the maximum profile deviation is 0.2 mu m.
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/6715
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding AuthorAina Wang
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
Aina Wang,Jun Yao,Dongmei Cai,et al. Design and fabrication of a pyramid wavefront sensor[J]. Optical Engineering,2010,49(7):073401.
APA Aina Wang,Jun Yao,Dongmei Cai,&Hao Ren.(2010).Design and fabrication of a pyramid wavefront sensor.Optical Engineering,49(7),073401.
MLA Aina Wang,et al."Design and fabrication of a pyramid wavefront sensor".Optical Engineering 49.7(2010):073401.
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