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题名:
Design and fabrication of a pyramid wavefront sensor
作者: Aina Wang; Jun Yao; Dongmei Cai; Hao Ren
刊名: Optical Engineering
出版日期: 2010
卷号: 49, 期号:7, 页码:073401
通讯作者: Aina Wang
文章类型: 期刊论文
中文摘要: A new pyramid wavefront sensor (PWFS), which utilizes a reflective pyramid mirror instead of a refractive pyramid prism at the focus of a telescope, is presented. As a key optical component in this PWFS, the pyramid mirror requires accurate microfabrication for excellent quality of the tip, the turned edges, and the surfaces. The moving mask lithography process is proposed for its economic, simple, and precise control to make the cross-sectional shape of the structure. The completed pyramid mirror has a square base of 1-mm length and four side facets inclined to the base at 3.7 deg. The sizes of the pyramid tip and turned edges are both about 6 mu m, which show excellent aspects of sharpening-tip and knife-edges. The root mean square of four facets is approximately 70 nm, and the maximum profile deviation is 0.2 mu m.
英文摘要: A new pyramid wavefront sensor (PWFS), which utilizes a reflective pyramid mirror instead of a refractive pyramid prism at the focus of a telescope, is presented. As a key optical component in this PWFS, the pyramid mirror requires accurate microfabrication for excellent quality of the tip, the turned edges, and the surfaces. The moving mask lithography process is proposed for its economic, simple, and precise control to make the cross-sectional shape of the structure. The completed pyramid mirror has a square base of 1-mm length and four side facets inclined to the base at 3.7 deg. The sizes of the pyramid tip and turned edges are both about 6 mu m, which show excellent aspects of sharpening-tip and knife-edges. The root mean square of four facets is approximately 70 nm, and the maximum profile deviation is 0.2 mu m.
语种: 英语
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/6715
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作者单位: 中国科学院光电技术研究所

Recommended Citation:
Aina Wang,Jun Yao,Dongmei Cai,et al. Design and fabrication of a pyramid wavefront sensor[J]. Optical Engineering,2010,49(7):073401.
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