| A MEMS micromirror driven by electrostatic force | |
| Hu Fangrong; Yao Jun; Qiu Chuankai; Ren Hao | |
| Source Publication | Journal of Electrostatics
 |
| Volume | 68Issue:3Pages:237-242 |
| 2010 | |
| Language | 英语 |
| Subtype | 期刊论文 |
| Document Type | 期刊论文 |
| Identifier | http://ir.ioe.ac.cn/handle/181551/6711 |
| Collection | 微细加工光学技术国家重点实验室（开放室） |
| Corresponding Author | Hu Fangrong |
| Affiliation | 中国科学院光电技术研究所 |
| Recommended Citation GB/T 7714 | Hu Fangrong,Yao Jun,Qiu Chuankai,et al. A MEMS micromirror driven by electrostatic force[J]. Journal of Electrostatics,2010,68(3):237-242. |
| APA | Hu Fangrong,Yao Jun,Qiu Chuankai,&Ren Hao.(2010).A MEMS micromirror driven by electrostatic force.Journal of Electrostatics,68(3),237-242. |
| MLA | Hu Fangrong,et al."A MEMS micromirror driven by electrostatic force".Journal of Electrostatics 68.3(2010):237-242. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 2010-092.pdf（1221KB） | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text | |
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