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A MEMS micromirror driven by electrostatic force
Hu Fangrong; Yao Jun; Qiu Chuankai; Ren Hao
Source PublicationJournal of Electrostatics
Volume68Issue:3Pages:237-242
2010
Language英语
Subtype期刊论文
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/6711
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding AuthorHu Fangrong
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
Hu Fangrong,Yao Jun,Qiu Chuankai,et al. A MEMS micromirror driven by electrostatic force[J]. Journal of Electrostatics,2010,68(3):237-242.
APA Hu Fangrong,Yao Jun,Qiu Chuankai,&Ren Hao.(2010).A MEMS micromirror driven by electrostatic force.Journal of Electrostatics,68(3),237-242.
MLA Hu Fangrong,et al."A MEMS micromirror driven by electrostatic force".Journal of Electrostatics 68.3(2010):237-242.
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