IOE OpenIR  > 微细加工光学技术国家重点实验室(开放室)
MEMS二维静电驱动扫描镜设计和分析
马文英; 姚军; 任豪; 王大甲
Source Publication微纳电子技术
Volume46Issue:5Pages:296-300
2009
Language中文
Subtype期刊论文
Abstract给出了一种静电驱动二维微扫描镜的设计和制造方案,所设计的扫描镜具有绕X轴和y轴转动的两个自由度,并具有体积小、功耗低、频率高等优点.推导了镜面旋转角表达式并分析了吸合效应.利用POLYMUMPS工艺完成了对扫描镜的加工
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/6705
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding Author马文英
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
马文英,姚军,任豪,等. MEMS二维静电驱动扫描镜设计和分析[J]. 微纳电子技术,2009,46(5):296-300.
APA 马文英,姚军,任豪,&王大甲.(2009).MEMS二维静电驱动扫描镜设计和分析.微纳电子技术,46(5),296-300.
MLA 马文英,et al."MEMS二维静电驱动扫描镜设计和分析".微纳电子技术 46.5(2009):296-300.
Files in This Item:
File Name/Size DocType Version Access License
2009-127.pdf(657KB)期刊论文作者接受稿开放获取CC BY-NC-SAView Application Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[马文英]'s Articles
[姚军]'s Articles
[任豪]'s Articles
Baidu academic
Similar articles in Baidu academic
[马文英]'s Articles
[姚军]'s Articles
[任豪]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[马文英]'s Articles
[姚军]'s Articles
[任豪]'s Articles
Terms of Use
No data!
Social Bookmark/Share
File name: 2009-127.pdf
Format: Adobe PDF
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.