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用亚稳态氩原子束制作纳米结构
陈献忠; 高洪涛; 姚汉民
Source Publication光学精密工程
Volume11Issue:1Pages:6~9
2003
Language中文
ISSN1004-924x
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/670
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding Author陈献忠
Recommended Citation
GB/T 7714
陈献忠,高洪涛,姚汉民. 用亚稳态氩原子束制作纳米结构[J]. 光学精密工程,2003,11(1):6~9.
APA 陈献忠,高洪涛,&姚汉民.(2003).用亚稳态氩原子束制作纳米结构.光学精密工程,11(1),6~9.
MLA 陈献忠,et al."用亚稳态氩原子束制作纳米结构".光学精密工程 11.1(2003):6~9.
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