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题名:
Localizing surface plasmons with a metal-cladding superlens for projecting deep-subwavelength patterns
作者: Xu T.; Fang L.; Ma J.; Zeng B.; Liu Y.; Cui J.; Wang C.; Feng Q.; Luo X.
刊名: Applied Physics B: Lasers and Optics
出版日期: 2009
卷号: 97, 期号:1, 页码:175-179
通讯作者: Xu T.
文章类型: 期刊论文
中文摘要: Superlens, which is proposed to realize sub-diffraction-limited optical imaging, has been experimentally verified (N. Fang et al., Science 308, 534 (2005), D. Melville and R.J. Blaikie, Opt. Express 13, 2127 (2005)). Based on the basic experimental configuration, here we propose a metal-cladding structure developed to effectively localize the surface plasmons for projecting deep-subwavelength patterns. We give a numerical analysis on the structure and show that proper choices of incident wavelength can realize Either deep-subwavelength interference patterning or high-quality optical imaging. The study presented here is believed to provide an approach for developing high-resolution optical lithography.
英文摘要: Superlens, which is proposed to realize sub-diffraction-limited optical imaging, has been experimentally verified (N. Fang et al., Science 308, 534 (2005), D. Melville and R.J. Blaikie, Opt. Express 13, 2127 (2005)). Based on the basic experimental configuration, here we propose a metal-cladding structure developed to effectively localize the surface plasmons for projecting deep-subwavelength patterns. We give a numerical analysis on the structure and show that proper choices of incident wavelength can realize Either deep-subwavelength interference patterning or high-quality optical imaging. The study presented here is believed to provide an approach for developing high-resolution optical lithography.
收录类别: SCI ; Ei
语种: 英语
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/6690
Appears in Collections:微细加工光学技术国家重点实验室(开放室)_期刊论文

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作者单位: 中国科学院光电技术研究所

Recommended Citation:
Xu T.,Fang L.,Ma J.,et al. Localizing surface plasmons with a metal-cladding superlens for projecting deep-subwavelength patterns[J]. Applied Physics B: Lasers and Optics,2009,97(1):175-179.
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