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题名:
Silicon-on-insulation-based deformable mirror array for adaptive optics
作者: Wang DJ; Yao J; Qiu CK; et al.
刊名: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
出版日期: 2009
卷号: 27, 期号:3, 页码:1291-1294
通讯作者: Wang DJ
文章类型: 期刊论文
中文摘要: In this paper, the authors present a continuous membrane deformable mirror array based on silicon-on-insulator (SOI) bulk micromachining technology for applications in adaptive optics. In order to facilitate the use of the device layers of SOI wafers for the reflective surface and electrostatic actuators, the fabrication of the micromirror array is separated from the electronics chip, and then they are bonded together using the flip-chip assembly. The optical reflective membrane formed by the device layer of one SOI wafer is of high quality in terms of flatness and surface roughness; the stroke space is mainly determined by the hEight of the device layer of another wafer. The simulation results of the actuator performance by the finite element analysis method shows that the stroke is up to 2  µm at about 70  V actuation voltage and the frequency is about 17.8  kHz.
英文摘要: In this paper, the authors present a continuous membrane deformable mirror array based on silicon-on-insulator (SOI) bulk micromachining technology for applications in adaptive optics. In order to facilitate the use of the device layers of SOI wafers for the reflective surface and electrostatic actuators, the fabrication of the micromirror array is separated from the electronics chip, and then they are bonded together using the flip-chip assembly. The optical reflective membrane formed by the device layer of one SOI wafer is of high quality in terms of flatness and surface roughness; the stroke space is mainly determined by the hEight of the device layer of another wafer. The simulation results of the actuator performance by the finite element analysis method shows that the stroke is up to 2  µm at about 70  V actuation voltage and the frequency is about 17.8  kHz.
收录类别: SCI
语种: 英语
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/6688
Appears in Collections:微细加工光学技术国家重点实验室(开放室)_期刊论文

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作者单位: 中国科学院光电技术研究所

Recommended Citation:
Wang DJ,Yao J,Qiu CK,et al. Silicon-on-insulation-based deformable mirror array for adaptive optics[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,2009,27(3):1291-1294.
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