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题名:
Combined Frequency- and Time-Domain Photocarrier Radiometry Characterization for Annealing Temperature Dependence of Arsenic Ion-Implanted Silicon Wafers
作者: Ren, Shengdong1,2,3; Li, Bincheng1,2; Wang, Qian1,2,3
刊名: International Journal of Thermophysics
出版日期: 2015
卷号: 36, 期号:5-6, 页码:1045-1050
学科分类: Annealing - Arsenic - Photoelectricity - Radiometry - Silicon - Temperature distribution
DOI: 10.1007/s10765-014-1603-7
通讯作者: Li, Bincheng
文章类型: 期刊论文
中文摘要: The annealing temperature dependences of the photocarrier radiometry (PCR) amplitude, the frequency dependences of the PCR amplitude and phase, as well as the quasi-time-domain PCR waveforms were simultaneously employed to analyze the thermally annealed (500C to 1100C) silicon samples with arsenic ion (As+) implantation of 1×1015 cm-2 dose. The dependence of the carrier effective lifetime on the annealing temperature has been extracted from the normalized quasi-time-domain PCR waveform profiles, and showed to be related to the transient PCR signals. Furthermore, the phenomenon of the reduction of the carrier effective lifetime caused by incomplete annealing (above 700C and 30 s) of As+ implanted silicon samples were observed and analyzed. © 2014, Springer Science+Business Media New York.
英文摘要: The annealing temperature dependences of the photocarrier radiometry (PCR) amplitude, the frequency dependences of the PCR amplitude and phase, as well as the quasi-time-domain PCR waveforms were simultaneously employed to analyze the thermally annealed (500C to 1100C) silicon samples with arsenic ion (As+) implantation of 1×1015 cm-2 dose. The dependence of the carrier effective lifetime on the annealing temperature has been extracted from the normalized quasi-time-domain PCR waveform profiles, and showed to be related to the transient PCR signals. Furthermore, the phenomenon of the reduction of the carrier effective lifetime caused by incomplete annealing (above 700C and 30 s) of As+ implanted silicon samples were observed and analyzed. © 2014, Springer Science+Business Media New York.
收录类别: SCI ; Ei
语种: 英语
WOS记录号: WOS:000356611100032
ISSN号: 0195-928X
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/6642
Appears in Collections:薄膜光学技术研究室(十一室)_期刊论文

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作者单位: 1. Institute of Optics and Electronics, Chinese Academy of Sciences, P. O. Box 350, Shuangliu, Chengdu
2.Sichuan, China
3. Key Laboratory of Optical Engineering, Chinese Academy of Sciences, Shuangliu, Chengdu
4.Sichuan, China
5. University of the Chinese Academy of Sciences, Beijing, China

Recommended Citation:
Ren, Shengdong,Li, Bincheng,Wang, Qian. Combined Frequency- and Time-Domain Photocarrier Radiometry Characterization for Annealing Temperature Dependence of Arsenic Ion-Implanted Silicon Wafers[J]. International Journal of Thermophysics,2015,36(5-6):1045-1050.
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