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题名:
Optimization of thickness uniformity of optical coatings on a conical substrate in a planetary rotation system
作者: Guo, Chun1,2; Kong, Mingdong1; Liu, Cunding1; Li, Bincheng1
刊名: Applied Optics
出版日期: 2013
卷号: 52, 期号:4, 页码:B26-B32
学科分类: Algorithms - Fused silica - Magnesium compounds - Optical coatings - Thermal evaporation
DOI: 10.1364/AO.52.000B26
通讯作者: Li, B. (bcli@ioe.ac.cn)
文章类型: 期刊论文
中文摘要: For a coating machine with a planetary rotation system and counterrotating shadowing mask configuration, a shadowing mask was designed using a numerical optimization algorithm to control the thickness uniformity of optical coatings formed on conical substrate. Single-layer magnesium fluoride (MgF2) and antireflective (AR) coating at 193 nm were fabricated on a convex conical substrate holder (with diameter 225 mm, apex angle 140 deg, and height 41 mm) by thermal evaporation. Thickness distribution determined from the transmittance spectra of single-layer MgF2 thin films on BK7 slices showed that uniformities better than 99.3% were experimentally achieved with the designed counterrotating shadowing mask. From the reflectance spectra, uniform optical performance was also obtained for the 193 nm AR coating deposited on fused-silica substrates. © 2013 Optical Society of America.
英文摘要: For a coating machine with a planetary rotation system and counterrotating shadowing mask configuration, a shadowing mask was designed using a numerical optimization algorithm to control the thickness uniformity of optical coatings formed on conical substrate. Single-layer magnesium fluoride (MgF2) and antireflective (AR) coating at 193 nm were fabricated on a convex conical substrate holder (with diameter 225 mm, apex angle 140 deg, and height 41 mm) by thermal evaporation. Thickness distribution determined from the transmittance spectra of single-layer MgF2 thin films on BK7 slices showed that uniformities better than 99.3% were experimentally achieved with the designed counterrotating shadowing mask. From the reflectance spectra, uniform optical performance was also obtained for the 193 nm AR coating deposited on fused-silica substrates. © 2013 Optical Society of America.
收录类别: SCI ; Ei
语种: 英语
WOS记录号: WOS:000314684600005
ISSN号: 1559128X
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/6628
Appears in Collections:薄膜光学技术研究室(十一室)_期刊论文

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作者单位: 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. University of Chinese Academy of Sciences, Beijing 100039, China

Recommended Citation:
Guo, Chun,Kong, Mingdong,Liu, Cunding,et al. Optimization of thickness uniformity of optical coatings on a conical substrate in a planetary rotation system[J]. Applied Optics,2013,52(4):B26-B32.
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