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题名:
Determination of optical constants in DUV/VUV
作者: Guo, Chun1,2; Kong, Mingdong1; Lin, Dawei1; Liu, Cunding1; Gao, Weidong1; Li, Bincheng1
刊名: Chinese Optics Letters
出版日期: 2013
卷号: 11, 期号:SUPPL.1, 页码:S10607
学科分类: Optical constants - Refractive index
DOI: 10.3788/COL201311.S10607
通讯作者: Li, B. (bcli@ioe.ac.cn)
文章类型: 期刊论文
中文摘要: An approach for determining the optical constants of the weakly absorbing substrate is developed and applied to obtain the parameters of CaF2 and fused silica substrates in deep ultraviolet (DUV) and vacuum ultraviolet (VUV) range. A method for extracting the optical constants of thin films deposited on strongly absorbing substrate, which is based on the reflectance spectra measured at different angles of incidence, is also presented. The optical constants are determined by fitting the measured spectra to the theoretical models. The proposed method is applied to determine the refractive index and extinction coefficient (n, k) of MgF2 film deposited on silicon substrate by electron beam evaporation with substrate temperature 300°C and deposition rate 0.2 nm/s. The determined n, k values at 193 nm are 1.433 and 9.1×10-4, respectively. © 2013 Chinese Optics Letters.
英文摘要: An approach for determining the optical constants of the weakly absorbing substrate is developed and applied to obtain the parameters of CaF2 and fused silica substrates in deep ultraviolet (DUV) and vacuum ultraviolet (VUV) range. A method for extracting the optical constants of thin films deposited on strongly absorbing substrate, which is based on the reflectance spectra measured at different angles of incidence, is also presented. The optical constants are determined by fitting the measured spectra to the theoretical models. The proposed method is applied to determine the refractive index and extinction coefficient (n, k) of MgF2 film deposited on silicon substrate by electron beam evaporation with substrate temperature 300°C and deposition rate 0.2 nm/s. The determined n, k values at 193 nm are 1.433 and 9.1×10-4, respectively. © 2013 Chinese Optics Letters.
收录类别: SCI ; Ei
语种: 英语
WOS记录号: WOS:000209349900046
ISSN号: 16717694
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/6624
Appears in Collections:薄膜光学技术研究室(十一室)_期刊论文

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作者单位: 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. University of Chinese Academy of Sciences, Beijing 100039, China

Recommended Citation:
Guo, Chun,Kong, Mingdong,Lin, Dawei,et al. Determination of optical constants in DUV/VUV[J]. Chinese Optics Letters,2013,11(SUPPL.1):S10607.
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