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题名:
Geometry optimization in planetary rotation stage for thickness uniformity of films on spherical substrates
作者: Liu, Cunding1; Guo, Chun1,2; Kong, Mingdong1; Li, Bincheng1
刊名: Chinese Optics Letters
出版日期: 2013
卷号: 11, 期号:SUPPL.1, 页码:S10213
学科分类: Optical coatings - Optimization - Spheres
DOI: 10.3788/COL201311.S10213
通讯作者: Li, B. (bcli@ioe.ac.cn)
文章类型: 期刊论文
中文摘要: We report the simulation results on the thickness uniformity of optical coatings deposited on spherical substrates by optimizing the geometric configuration parameters, such as tilting angle of the substrate holder and position of the evaporation source in a 1 000-mm-diameter planetary rotation stage (PRS). We reveal that good film uniformity on convex spherical surfaces or flat substrates, as well as concave surfaces with weak to moderate curvatures can be obtained through appropriate tilting of the substrate holder. For 300-mm-diameter substrates with clear aperture to radius of curvature (CA/RoC) between -0.3 and 0.7, the achievable film uniformity is above 99%. The source position is optimized to achieve good film uniformity. © 2013 Chinese Optics Letters.
英文摘要: We report the simulation results on the thickness uniformity of optical coatings deposited on spherical substrates by optimizing the geometric configuration parameters, such as tilting angle of the substrate holder and position of the evaporation source in a 1 000-mm-diameter planetary rotation stage (PRS). We reveal that good film uniformity on convex spherical surfaces or flat substrates, as well as concave surfaces with weak to moderate curvatures can be obtained through appropriate tilting of the substrate holder. For 300-mm-diameter substrates with clear aperture to radius of curvature (CA/RoC) between -0.3 and 0.7, the achievable film uniformity is above 99%. The source position is optimized to achieve good film uniformity. © 2013 Chinese Optics Letters.
收录类别: SCI ; Ei
语种: 英语
WOS记录号: WOS:000209349900019
ISSN号: 16717694
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/6623
Appears in Collections:薄膜光学技术研究室(十一室)_期刊论文

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作者单位: 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. Graduate School of the Chinese Academy of Sciences, Beijing 100039, China

Recommended Citation:
Liu, Cunding,Guo, Chun,Kong, Mingdong,et al. Geometry optimization in planetary rotation stage for thickness uniformity of films on spherical substrates[J]. Chinese Optics Letters,2013,11(SUPPL.1):S10213.
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