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Geometry optimization in planetary rotation stage for thickness uniformity of films on spherical substrates
Liu, Cunding1; Guo, Chun1,2; Kong, Mingdong1; Li, Bincheng1; Li, B. (bcli@ioe.ac.cn)
Source PublicationChinese Optics Letters
Volume11Issue:SUPPL.1Pages:S10213
2013
Language英语
ISSN16717694
DOI10.3788/COL201311.S10213
Indexed BySCI ; Ei
WOS IDWOS:000209349900019
Subtype期刊论文
AbstractWe report the simulation results on the thickness uniformity of optical coatings deposited on spherical substrates by optimizing the geometric configuration parameters, such as tilting angle of the substrate holder and position of the evaporation source in a 1 000-mm-diameter planetary rotation stage (PRS). We reveal that good film uniformity on convex spherical surfaces or flat substrates, as well as concave surfaces with weak to moderate curvatures can be obtained through appropriate tilting of the substrate holder. For 300-mm-diameter substrates with clear aperture to radius of curvature (CA/RoC) between -0.3 and 0.7, the achievable film uniformity is above 99%. The source position is optimized to achieve good film uniformity. © 2013 Chinese Optics Letters.; We report the simulation results on the thickness uniformity of optical coatings deposited on spherical substrates by optimizing the geometric configuration parameters, such as tilting angle of the substrate holder and position of the evaporation source in a 1 000-mm-diameter planetary rotation stage (PRS). We reveal that good film uniformity on convex spherical surfaces or flat substrates, as well as concave surfaces with weak to moderate curvatures can be obtained through appropriate tilting of the substrate holder. For 300-mm-diameter substrates with clear aperture to radius of curvature (CA/RoC) between -0.3 and 0.7, the achievable film uniformity is above 99%. The source position is optimized to achieve good film uniformity. © 2013 Chinese Optics Letters.
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Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/6623
Collection薄膜光学技术研究室(十一室)
Corresponding AuthorLi, B. (bcli@ioe.ac.cn)
Affiliation1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. Graduate School of the Chinese Academy of Sciences, Beijing 100039, China
Recommended Citation
GB/T 7714
Liu, Cunding,Guo, Chun,Kong, Mingdong,et al. Geometry optimization in planetary rotation stage for thickness uniformity of films on spherical substrates[J]. Chinese Optics Letters,2013,11(SUPPL.1):S10213.
APA Liu, Cunding,Guo, Chun,Kong, Mingdong,Li, Bincheng,&Li, B. .(2013).Geometry optimization in planetary rotation stage for thickness uniformity of films on spherical substrates.Chinese Optics Letters,11(SUPPL.1),S10213.
MLA Liu, Cunding,et al."Geometry optimization in planetary rotation stage for thickness uniformity of films on spherical substrates".Chinese Optics Letters 11.SUPPL.1(2013):S10213.
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