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题名:
Microstructure-related properties of magnesium fluoride films at 193nm by oblique-angle deposition
作者: Guo, Chun1,2; Kong, Mingdong1; Lin, Dawei1; Liu, Cunding1; Li, Bincheng1
刊名: Optics Express
出版日期: 2013
卷号: 21, 期号:1, 页码:960-967
学科分类: Atomic force microscopy - Magnesium compounds - Microstructure - Refractive index - Resistive evaporation - Scanning electron microscopy - X ray diffraction
DOI: 10.1364/OE.21.000960
通讯作者: Guo, C.
文章类型: 期刊论文
中文摘要: Magnesium fluoride (MgF2) films deposited by resistive heating evaporation with oblique-angle deposition have been investigated in details. The optical and micro-structural properties of single-layer MgF2 films were characterized by UV-VIS and FTIR spectrophotometers, scanning electron microscope (SEM), atomic force microscope (AFM), and x-ray diffraction (XRD), respectively. The dependences of the optical and micro-structural parameters of the thin films on the deposition angle were analyzed. It was found that the MgF2 film in a columnar microstructure was negatively inhomogeneous of refractive index and polycrystalline. As the deposition angle increased, the optical loss, extinction coefficient, root-mean-square (rms) roughness, dislocation density and columnar angle of the MgF2 films increased, while the refractive index, packing density and grain size decreased. Furthermore, IR absorption of the MgF2 films depended on the columnar structured growth. © 2013 Optical Society of America.
英文摘要: Magnesium fluoride (MgF2) films deposited by resistive heating evaporation with oblique-angle deposition have been investigated in details. The optical and micro-structural properties of single-layer MgF2 films were characterized by UV-VIS and FTIR spectrophotometers, scanning electron microscope (SEM), atomic force microscope (AFM), and x-ray diffraction (XRD), respectively. The dependences of the optical and micro-structural parameters of the thin films on the deposition angle were analyzed. It was found that the MgF2 film in a columnar microstructure was negatively inhomogeneous of refractive index and polycrystalline. As the deposition angle increased, the optical loss, extinction coefficient, root-mean-square (rms) roughness, dislocation density and columnar angle of the MgF2 films increased, while the refractive index, packing density and grain size decreased. Furthermore, IR absorption of the MgF2 films depended on the columnar structured growth. © 2013 Optical Society of America.
收录类别: SCI ; Ei
语种: 英语
WOS记录号: WOS:000315988100120
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/6618
Appears in Collections:薄膜光学技术研究室(十一室)_期刊论文

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作者单位: 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. University of Chinese Academy of Sciences, Beijing 100039, China

Recommended Citation:
Guo, Chun,Kong, Mingdong,Lin, Dawei,et al. Microstructure-related properties of magnesium fluoride films at 193nm by oblique-angle deposition[J]. Optics Express,2013,21(1):960-967.
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