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题名:
Simultaneous determination of optical constants, thickness, and surface roughness of thin film from spectrophotometric measurements
作者: Guo, Chun1,2; Kong, Mingdong1; Gao, Weidong1; Li, Bincheng1
刊名: Optics Letters
出版日期: 2013
卷号: 38, 期号:1, 页码:40-42
学科分类: Atomic force microscopy - Deposition - Optical constants - Refractive index - Spectrophotometers - Spectrophotometry - Surface roughness - Thin films - Vapor deposition
DOI: 10.1364/OL.38.000040
通讯作者: Li, B. (bcli@ioe.ac.cn)
文章类型: 期刊论文
中文摘要: A model taking into consideration the refractive index inhomogeneity and surface roughness of a film was proposed for the simultaneous determination of the optical constants, thickness, and surface roughness of a single-layer thin film from spectrophotometric measurements. In the model, the rough surface was treated as an effective absorbing layer. The model was applied to determine simultaneously the parameters of single-layer MgF2 thin films deposited on fused silica substrates by the oblique-angle deposition technique. The film thicknesses and rms surface roughnesses extracted from spectrophotometric measurements with the proposed model were in good agreement with the values measured by a spectroscopic ellipsometer and an atomic force microscope, respectively. © 2012 Optical Society of America.
英文摘要: A model taking into consideration the refractive index inhomogeneity and surface roughness of a film was proposed for the simultaneous determination of the optical constants, thickness, and surface roughness of a single-layer thin film from spectrophotometric measurements. In the model, the rough surface was treated as an effective absorbing layer. The model was applied to determine simultaneously the parameters of single-layer MgF2 thin films deposited on fused silica substrates by the oblique-angle deposition technique. The film thicknesses and rms surface roughnesses extracted from spectrophotometric measurements with the proposed model were in good agreement with the values measured by a spectroscopic ellipsometer and an atomic force microscope, respectively. © 2012 Optical Society of America.
收录类别: SCI ; Ei
语种: 英语
WOS记录号: WOS:000312708200014
ISSN号: 01469592
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/6614
Appears in Collections:薄膜光学技术研究室(十一室)_期刊论文

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作者单位: 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. University of Chinese Academy of Sciences, Beijing 100039, China

Recommended Citation:
Guo, Chun,Kong, Mingdong,Gao, Weidong,et al. Simultaneous determination of optical constants, thickness, and surface roughness of thin film from spectrophotometric measurements[J]. Optics Letters,2013,38(1):40-42.
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