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Simultaneous determination of optical constants, thickness, and surface roughness of thin film from spectrophotometric measurements
Guo, Chun1,2; Kong, Mingdong1; Gao, Weidong1; Li, Bincheng1; Li, B. (bcli@ioe.ac.cn)
Source PublicationOptics Letters
Volume38Issue:1Pages:40-42
2013
Language英语
ISSN01469592
DOI10.1364/OL.38.000040
Indexed BySCI ; Ei
WOS IDWOS:000312708200014
Subtype期刊论文
AbstractA model taking into consideration the refractive index inhomogeneity and surface roughness of a film was proposed for the simultaneous determination of the optical constants, thickness, and surface roughness of a single-layer thin film from spectrophotometric measurements. In the model, the rough surface was treated as an effective absorbing layer. The model was applied to determine simultaneously the parameters of single-layer MgF2 thin films deposited on fused silica substrates by the oblique-angle deposition technique. The film thicknesses and rms surface roughnesses extracted from spectrophotometric measurements with the proposed model were in good agreement with the values measured by a spectroscopic ellipsometer and an atomic force microscope, respectively. © 2012 Optical Society of America.; A model taking into consideration the refractive index inhomogeneity and surface roughness of a film was proposed for the simultaneous determination of the optical constants, thickness, and surface roughness of a single-layer thin film from spectrophotometric measurements. In the model, the rough surface was treated as an effective absorbing layer. The model was applied to determine simultaneously the parameters of single-layer MgF2 thin films deposited on fused silica substrates by the oblique-angle deposition technique. The film thicknesses and rms surface roughnesses extracted from spectrophotometric measurements with the proposed model were in good agreement with the values measured by a spectroscopic ellipsometer and an atomic force microscope, respectively. © 2012 Optical Society of America.
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Cited Times:12[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/6614
Collection薄膜光学技术研究室(十一室)
Corresponding AuthorLi, B. (bcli@ioe.ac.cn)
Affiliation1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. University of Chinese Academy of Sciences, Beijing 100039, China
Recommended Citation
GB/T 7714
Guo, Chun,Kong, Mingdong,Gao, Weidong,et al. Simultaneous determination of optical constants, thickness, and surface roughness of thin film from spectrophotometric measurements[J]. Optics Letters,2013,38(1):40-42.
APA Guo, Chun,Kong, Mingdong,Gao, Weidong,Li, Bincheng,&Li, B. .(2013).Simultaneous determination of optical constants, thickness, and surface roughness of thin film from spectrophotometric measurements.Optics Letters,38(1),40-42.
MLA Guo, Chun,et al."Simultaneous determination of optical constants, thickness, and surface roughness of thin film from spectrophotometric measurements".Optics Letters 38.1(2013):40-42.
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