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题名:
Theoretical design of shadowing masks for uniform coatings on spherical substrates in planetary rotation systems
作者: Liu, Cunding1; Kong, Mingdong1; Guo, Chun1,2; Gao, Weidong1; Li, Bincheng1
刊名: Optics Express
出版日期: 2012
卷号: 20, 期号:21, 页码:23790-23797
学科分类: Coatings - Rotation - Spheres
DOI: 10.1364/OE.20.023790
通讯作者: Liu, C.
文章类型: 期刊论文
中文摘要: A straightforward theoretical routine is proposed to design shadowing masks which are used for preparing uniform coatings on flat as well as strongly curved spherical substrates with large diameters in planetary rotation system. By approximating a spherical substrate in planetary rotation to a corresponding flat substrate in simple rotation around the revolution axis, the initial shape of a shadowing mask is determined. The desired uniformity for the spherical substrate is further realized through expanding appropriately the arc length of the initial shadowing mask. Utilizing the shadowing masks designed with the theoretical routine, film uniformities better than 97% are experimentally achieved for large-diameter spherical substrates with ratios of clear aperture to radius of curvature range from approximately -1.0 to 1.3. © 2012 Optical Society of America.
英文摘要: A straightforward theoretical routine is proposed to design shadowing masks which are used for preparing uniform coatings on flat as well as strongly curved spherical substrates with large diameters in planetary rotation system. By approximating a spherical substrate in planetary rotation to a corresponding flat substrate in simple rotation around the revolution axis, the initial shape of a shadowing mask is determined. The desired uniformity for the spherical substrate is further realized through expanding appropriately the arc length of the initial shadowing mask. Utilizing the shadowing masks designed with the theoretical routine, film uniformities better than 97% are experimentally achieved for large-diameter spherical substrates with ratios of clear aperture to radius of curvature range from approximately -1.0 to 1.3. © 2012 Optical Society of America.
收录类别: Ei
语种: 英语
WOS记录号: WOS:000309955100084
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/6606
Appears in Collections:薄膜光学技术研究室(十一室)_期刊论文

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作者单位: 1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. Graduate School, Chinese Academy of Sciences, Beijing 100039, China

Recommended Citation:
Liu, Cunding,Kong, Mingdong,Guo, Chun,et al. Theoretical design of shadowing masks for uniform coatings on spherical substrates in planetary rotation systems[J]. Optics Express,2012,20(21):23790-23797.
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