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Theoretical design of shadowing masks for uniform coatings on spherical substrates in planetary rotation systems
Liu, Cunding1; Kong, Mingdong1; Guo, Chun1,2; Gao, Weidong1; Li, Bincheng1; Liu, C.
Source PublicationOptics Express
Volume20Issue:21Pages:23790-23797
2012
Language英语
DOI10.1364/OE.20.023790
Indexed ByEi
WOS IDWOS:000309955100084
Subtype期刊论文
AbstractA straightforward theoretical routine is proposed to design shadowing masks which are used for preparing uniform coatings on flat as well as strongly curved spherical substrates with large diameters in planetary rotation system. By approximating a spherical substrate in planetary rotation to a corresponding flat substrate in simple rotation around the revolution axis, the initial shape of a shadowing mask is determined. The desired uniformity for the spherical substrate is further realized through expanding appropriately the arc length of the initial shadowing mask. Utilizing the shadowing masks designed with the theoretical routine, film uniformities better than 97% are experimentally achieved for large-diameter spherical substrates with ratios of clear aperture to radius of curvature range from approximately -1.0 to 1.3. © 2012 Optical Society of America.; A straightforward theoretical routine is proposed to design shadowing masks which are used for preparing uniform coatings on flat as well as strongly curved spherical substrates with large diameters in planetary rotation system. By approximating a spherical substrate in planetary rotation to a corresponding flat substrate in simple rotation around the revolution axis, the initial shape of a shadowing mask is determined. The desired uniformity for the spherical substrate is further realized through expanding appropriately the arc length of the initial shadowing mask. Utilizing the shadowing masks designed with the theoretical routine, film uniformities better than 97% are experimentally achieved for large-diameter spherical substrates with ratios of clear aperture to radius of curvature range from approximately -1.0 to 1.3. © 2012 Optical Society of America.
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Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/6606
Collection薄膜光学技术研究室(十一室)
Corresponding AuthorLiu, C.
Affiliation1. Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2. Graduate School, Chinese Academy of Sciences, Beijing 100039, China
Recommended Citation
GB/T 7714
Liu, Cunding,Kong, Mingdong,Guo, Chun,et al. Theoretical design of shadowing masks for uniform coatings on spherical substrates in planetary rotation systems[J]. Optics Express,2012,20(21):23790-23797.
APA Liu, Cunding,Kong, Mingdong,Guo, Chun,Gao, Weidong,Li, Bincheng,&Liu, C..(2012).Theoretical design of shadowing masks for uniform coatings on spherical substrates in planetary rotation systems.Optics Express,20(21),23790-23797.
MLA Liu, Cunding,et al."Theoretical design of shadowing masks for uniform coatings on spherical substrates in planetary rotation systems".Optics Express 20.21(2012):23790-23797.
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