IOE OpenIR  > 薄膜光学技术研究室(十一室)
Analysis of modulated free-carrier absorption measurement of electronic transport properties of silicon wafers
Wei Li; Bincheng Li
Source PublicationJournal of Physics: Conference Series
Volume214
2010
Language英语
Subtype期刊论文
AbstractBased on a three-dimensional modulated free carrier absorption (MFCA) model, theoretical analysis is performed to investigate the dependences of MFCA amplitude and phase on the electronic transport properties (the carrier lifetime, the carrier diffusivity, and the front surface recombination velocity) at different pump-to-probe separations and different modulation frequencies. The sensitivity of the multi-parameter estimate employing the dependences of the MFCA amplitude and phase on the modulation frequency at several pump-to-probe separations is theoretically compared with that employing the dependences on the pump-to-probe separation measured at several modulation frequencies. Simulation results show that the two approaches have comparable sensitivities to the electronic transport properties of silicon wafers. As for the MFCA experiments, the frequency scan data measured at different pump-to-probe separations have higher signal-to-noise ratios and therefore should be preferable to the simultaneous determination of the multiple transport properties.; Based on a three-dimensional modulated free carrier absorption (MFCA) model, theoretical analysis is performed to investigate the dependences of MFCA amplitude and phase on the electronic transport properties (the carrier lifetime, the carrier diffusivity, and the front surface recombination velocity) at different pump-to-probe separations and different modulation frequencies. The sensitivity of the multi-parameter estimate employing the dependences of the MFCA amplitude and phase on the modulation frequency at several pump-to-probe separations is theoretically compared with that employing the dependences on the pump-to-probe separation measured at several modulation frequencies. Simulation results show that the two approaches have comparable sensitivities to the electronic transport properties of silicon wafers. As for the MFCA experiments, the frequency scan data measured at different pump-to-probe separations have higher signal-to-noise ratios and therefore should be preferable to the simultaneous determination of the multiple transport properties.
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/6575
Collection薄膜光学技术研究室(十一室)
Corresponding AuthorWei Li
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
Wei Li,Bincheng Li. Analysis of modulated free-carrier absorption measurement of electronic transport properties of silicon wafers[J]. Journal of Physics: Conference Series,2010,214.
APA Wei Li,&Bincheng Li.(2010).Analysis of modulated free-carrier absorption measurement of electronic transport properties of silicon wafers.Journal of Physics: Conference Series,214.
MLA Wei Li,et al."Analysis of modulated free-carrier absorption measurement of electronic transport properties of silicon wafers".Journal of Physics: Conference Series 214(2010).
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