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Accurate determination of subnanoscale deformation with combined laser calorimetry and surface thermal lens technique
Liu Mingqiang; Li Bincheng; Wang Yanru
Source PublicationApplied Physics Letters
Volume94Issue:13Pages:131905
2009
Language英语
Indexed BySCI ; Ei
Subtype期刊论文
AbstractLaser-induced surface deformations of optical components are measured with a combined laser calorimetry (LC) and surface thermal lens (STL) technique. The deformation is calculated from the STL amplitude by employing a simple STL model. It is also directly calculated with a rigorous deformation model by measuring the absorptance of the optical component with LC. Experimentally, the laser-induced surface deformation values of a BK7 coating sample measured by STL and Hartmann wavefront sensing techniques are in excellent agreement with that calculated with the rigorous deformation model. The measurement of subnanometer deformation with the combined LC and STL technique is demonstrated by a fused silica coating sample. The deformation measurement sensitivity and error are estimated to be 10 pm and below 10percent, respectively.; Laser-induced surface deformations of optical components are measured with a combined laser calorimetry (LC) and surface thermal lens (STL) technique. The deformation is calculated from the STL amplitude by employing a simple STL model. It is also directly calculated with a rigorous deformation model by measuring the absorptance of the optical component with LC. Experimentally, the laser-induced surface deformation values of a BK7 coating sample measured by STL and Hartmann wavefront sensing techniques are in excellent agreement with that calculated with the rigorous deformation model. The measurement of subnanometer deformation with the combined LC and STL technique is demonstrated by a fused silica coating sample. The deformation measurement sensitivity and error are estimated to be 10 pm and below 10percent, respectively.
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/6565
Collection薄膜光学技术研究室(十一室)
Corresponding AuthorLiu Mingqiang
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
Liu Mingqiang,Li Bincheng,Wang Yanru. Accurate determination of subnanoscale deformation with combined laser calorimetry and surface thermal lens technique[J]. Applied Physics Letters,2009,94(13):131905.
APA Liu Mingqiang,Li Bincheng,&Wang Yanru.(2009).Accurate determination of subnanoscale deformation with combined laser calorimetry and surface thermal lens technique.Applied Physics Letters,94(13),131905.
MLA Liu Mingqiang,et al."Accurate determination of subnanoscale deformation with combined laser calorimetry and surface thermal lens technique".Applied Physics Letters 94.13(2009):131905.
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