Accurate determination of subnanoscale deformation with combined laser calorimetry and surface thermal lens technique | |
Liu Mingqiang; Li Bincheng; Wang Yanru | |
Source Publication | Applied Physics Letters
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Volume | 94Issue:13Pages:131905 |
2009 | |
Language | 英语 |
Indexed By | SCI ; Ei |
Subtype | 期刊论文 |
Abstract | Laser-induced surface deformations of optical components are measured with a combined laser calorimetry (LC) and surface thermal lens (STL) technique. The deformation is calculated from the STL amplitude by employing a simple STL model. It is also directly calculated with a rigorous deformation model by measuring the absorptance of the optical component with LC. Experimentally, the laser-induced surface deformation values of a BK7 coating sample measured by STL and Hartmann wavefront sensing techniques are in excellent agreement with that calculated with the rigorous deformation model. The measurement of subnanometer deformation with the combined LC and STL technique is demonstrated by a fused silica coating sample. The deformation measurement sensitivity and error are estimated to be 10 pm and below 10percent, respectively.; Laser-induced surface deformations of optical components are measured with a combined laser calorimetry (LC) and surface thermal lens (STL) technique. The deformation is calculated from the STL amplitude by employing a simple STL model. It is also directly calculated with a rigorous deformation model by measuring the absorptance of the optical component with LC. Experimentally, the laser-induced surface deformation values of a BK7 coating sample measured by STL and Hartmann wavefront sensing techniques are in excellent agreement with that calculated with the rigorous deformation model. The measurement of subnanometer deformation with the combined LC and STL technique is demonstrated by a fused silica coating sample. The deformation measurement sensitivity and error are estimated to be 10 pm and below 10percent, respectively. |
Document Type | 期刊论文 |
Identifier | http://ir.ioe.ac.cn/handle/181551/6565 |
Collection | 薄膜光学技术研究室(十一室) |
Corresponding Author | Liu Mingqiang |
Affiliation | 中国科学院光电技术研究所 |
Recommended Citation GB/T 7714 | Liu Mingqiang,Li Bincheng,Wang Yanru. Accurate determination of subnanoscale deformation with combined laser calorimetry and surface thermal lens technique[J]. Applied Physics Letters,2009,94(13):131905. |
APA | Liu Mingqiang,Li Bincheng,&Wang Yanru.(2009).Accurate determination of subnanoscale deformation with combined laser calorimetry and surface thermal lens technique.Applied Physics Letters,94(13),131905. |
MLA | Liu Mingqiang,et al."Accurate determination of subnanoscale deformation with combined laser calorimetry and surface thermal lens technique".Applied Physics Letters 94.13(2009):131905. |
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2009-207.pdf(252KB) | 期刊论文 | 作者接受稿 | 开放获取 | CC BY-NC-SA | View Application Full Text |
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