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题名:
Characterization of single LaF3 and MgF2 films on spherical substrate by planetary deposition
作者: Liu, Cunding1,2; Kong, Mingdong1,2; Li, Bincheng1,3
刊名: THIN SOLID FILMS
出版日期: 2016-08-01
卷号: 612, 页码:296-302
关键词: Planetary deposition ; Magnesium fluoride ; Lanthanum fluoride ; Column slanting angles ; Flux vector theory ; Refractive index inhomogeneity
DOI: 10.1016/j.tsf.2016.06.017
文章类型: Article
英文摘要: LaF3 and MgF2 films were prepared upon witness plates distributed on a steep spherical substrate by thermal evaporation and planetary deposition. Micro-structures and optical properties of the films at different locations of the spherical substrate were comprehensively investigated. Column slanting angles of the films are experimentally revealed to increase from the center to the brim of spherical substrate, as interpreted by a flux vector theory. Accompanied by the increased column slanting angles, the average refractive indices of the films decrease while the refractive index inhomogeneities increase from the substrate center to the brim. Influence of the position-dependent refractive index and refractive index inhomogeneity on the optical spectra of 193 nm interference antireflective coatings is experimentally demonstrated. This investigation is helpful for optimizing the spectral uniformity and minimizing the wave-front aberration of 193 nm interference coatings used in micro-lithography systems. (C) 2016 Elsevier B.V. All rights reserved.
WOS标题词: Science & Technology ; Technology ; Physical Sciences
类目[WOS]: Materials Science, Multidisciplinary ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
研究领域[WOS]: Materials Science ; Physics
关键词[WOS]: MAGNESIUM FLUORIDE FILMS ; THIN-FILMS ; SPECTROSCOPIC ELLIPSOMETRY ; OPTICAL-CONSTANTS ; ANGLE DEPOSITION ; MICROSTRUCTURE ; EVAPORATION ; ROUGHNESS ; COATINGS ; SYSTEMS
收录类别: SCI
项目资助者: Youth Innovation Promotion Association, Chinese Academy of Sciences(2016337)
语种: 英语
WOS记录号: WOS:000380511900044
ISSN号: 0040-6090
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/6470
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
3.Univ Elect Sci & Technol China, Sch Optoelect Informat, Chengdu 610054, Peoples R China

Recommended Citation:
Liu, Cunding,Kong, Mingdong,Li, Bincheng. Characterization of single LaF3 and MgF2 films on spherical substrate by planetary deposition[J]. THIN SOLID FILMS,2016,612:296-302.
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