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Characterization of single LaF3 and MgF2 films on spherical substrate by planetary deposition
Liu, Cunding1,2; Kong, Mingdong1,2; Li, Bincheng1,3
Source PublicationTHIN SOLID FILMS
Volume612Pages:296-302
2016-08-01
Language英语
ISSN0040-6090
DOI10.1016/j.tsf.2016.06.017
Indexed BySCI
WOS IDWOS:000380511900044
SubtypeArticle
AbstractLaF3 and MgF2 films were prepared upon witness plates distributed on a steep spherical substrate by thermal evaporation and planetary deposition. Micro-structures and optical properties of the films at different locations of the spherical substrate were comprehensively investigated. Column slanting angles of the films are experimentally revealed to increase from the center to the brim of spherical substrate, as interpreted by a flux vector theory. Accompanied by the increased column slanting angles, the average refractive indices of the films decrease while the refractive index inhomogeneities increase from the substrate center to the brim. Influence of the position-dependent refractive index and refractive index inhomogeneity on the optical spectra of 193 nm interference antireflective coatings is experimentally demonstrated. This investigation is helpful for optimizing the spectral uniformity and minimizing the wave-front aberration of 193 nm interference coatings used in micro-lithography systems. (C) 2016 Elsevier B.V. All rights reserved.
KeywordPlanetary Deposition Magnesium Fluoride Lanthanum Fluoride Column Slanting Angles Flux Vector Theory Refractive Index Inhomogeneity
WOS KeywordMAGNESIUM FLUORIDE FILMS ; THIN-FILMS ; SPECTROSCOPIC ELLIPSOMETRY ; OPTICAL-CONSTANTS ; ANGLE DEPOSITION ; MICROSTRUCTURE ; EVAPORATION ; ROUGHNESS ; COATINGS ; SYSTEMS
WOS Research AreaMaterials Science ; Physics
WOS SubjectMaterials Science, Multidisciplinary ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter
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Cited Times:2[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/6470
Collection光电技术研究所被WoS收录文章
Affiliation1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
3.Univ Elect Sci & Technol China, Sch Optoelect Informat, Chengdu 610054, Peoples R China
Recommended Citation
GB/T 7714
Liu, Cunding,Kong, Mingdong,Li, Bincheng. Characterization of single LaF3 and MgF2 films on spherical substrate by planetary deposition[J]. THIN SOLID FILMS,2016,612:296-302.
APA Liu, Cunding,Kong, Mingdong,&Li, Bincheng.(2016).Characterization of single LaF3 and MgF2 films on spherical substrate by planetary deposition.THIN SOLID FILMS,612,296-302.
MLA Liu, Cunding,et al."Characterization of single LaF3 and MgF2 films on spherical substrate by planetary deposition".THIN SOLID FILMS 612(2016):296-302.
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