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题名:
Extended range phase-sensitive swept source interferometer for real-time dimensional metrology
作者: Shen, Yi1; Ding, Zhihua1; Yan, Yangzhi1; Wang, Chuan1; Yang, Yaliang2; Zhang, Yudong2
刊名: Optics Communications
出版日期: 2014
卷号: 318, 页码:88-94
学科分类: Interferometers - Optical systems - Units of measurement
DOI: 10.1016/j.optcom.2013.12.065
通讯作者: Ding, Z. (zh_ding@zju.edu.cn)
文章类型: 期刊论文
中文摘要: The measurement of center thicknesses and airgaps along its optical axis is crucial to a mounted optical system. Aiming to real-time dimensional metrology, an extended range phase-sensitive swept source interferometric system is developed. To yield high precision of measurement, reference interferometer sharing the same swept source with the measurement interferometer is introduced and a phase-sensitive approach based on phase-comparison between measurement signal and reference signal is exploited. The proposed phase-comparison method is theoretically developed and its merits over standard phase-sensitive approach are experimentally confirmed. In contrast to the standard phase-sensitive approach, the sensitivity under signal to noise ratio of 45 dB achieved by the phase-comparison method is improved from 222 nm to 25 nm and the processing time is shorten by 90%. Measurements of glass plates are performed to evaluate the performance of the developed system. Submicron precision about a range of 30 mm is realized by the developed system equipped by a commercial available swept source operating at a sweeping rate of 10 kHz. The developed system holds potential application in real-time contact-free on-axis metrology for the fabrication and testing of complex optical systems. © 2013 Elsevier B.V.
英文摘要: The measurement of center thicknesses and airgaps along its optical axis is crucial to a mounted optical system. Aiming to real-time dimensional metrology, an extended range phase-sensitive swept source interferometric system is developed. To yield high precision of measurement, reference interferometer sharing the same swept source with the measurement interferometer is introduced and a phase-sensitive approach based on phase-comparison between measurement signal and reference signal is exploited. The proposed phase-comparison method is theoretically developed and its merits over standard phase-sensitive approach are experimentally confirmed. In contrast to the standard phase-sensitive approach, the sensitivity under signal to noise ratio of 45 dB achieved by the phase-comparison method is improved from 222 nm to 25 nm and the processing time is shorten by 90%. Measurements of glass plates are performed to evaluate the performance of the developed system. Submicron precision about a range of 30 mm is realized by the developed system equipped by a commercial available swept source operating at a sweeping rate of 10 kHz. The developed system holds potential application in real-time contact-free on-axis metrology for the fabrication and testing of complex optical systems. © 2013 Elsevier B.V.
收录类别: SCI ; Ei
项目资助者: Chinese Natural Science Foundation [61275196, 61335003, 61327007] ; Zhejiang Province Science and Technology Grant [201203031]
语种: 英语
WOS记录号: WOS:000332817200017
ISSN号: 00304018
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/6390
Appears in Collections:自适应光学技术研究室(八室)_期刊论文

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作者单位: 1. State Key Lab of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China
2. Key Laboratory on Adaptive Optics, Chinese Academy of Sciences, Chengdu 610209, China

Recommended Citation:
Shen, Yi,Ding, Zhihua,Yan, Yangzhi,et al. Extended range phase-sensitive swept source interferometer for real-time dimensional metrology[J]. Optics Communications,2014,318:88-94.
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