IOE OpenIR  > 微电子装备总体研究室(四室微光学)
Department四室微光学
微透镜列阵光刻工艺过程的模拟与分析
董小春; 杜春雷; 陈波; 潘丽
Source Publication微纳电子技术
Issue12Pages:39-42
2003
Language中文
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/637
Collection微电子装备总体研究室(四室微光学)
Corresponding Author董小春
Recommended Citation
GB/T 7714
董小春,杜春雷,陈波,等. 微透镜列阵光刻工艺过程的模拟与分析[J]. 微纳电子技术,2003(12):39-42.
APA 董小春,杜春雷,陈波,&潘丽.(2003).微透镜列阵光刻工艺过程的模拟与分析.微纳电子技术(12),39-42.
MLA 董小春,et al."微透镜列阵光刻工艺过程的模拟与分析".微纳电子技术 .12(2003):39-42.
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