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题名:
Studies on properties of YbF3 thin film by different deposition parameters
作者: Zhang, Yaoping; Zhou, Hong; Fan, Junqi; Xu, Hong
刊名: Chinese Optics Letters
出版日期: 2013
卷号: 11, 期号:SUPPL.1, 页码:S10215
学科分类: Coatings - Germanium - Thin films
DOI: 10.3788/COL201311.S10215
通讯作者: Zhang, Y. (zyp_820@163.com)
文章类型: 期刊论文
中文摘要: YbF3 is proposed as a substitute for ThF4 in anti-reflection or reflection coatings in the infrared (IR) range. In this letter, we study on the properties of the YbF3 thin film deposited with different deposition parameters, and find the deposition rate of YbF3 has a large effect on the substrate particles deposition both on number and area. Moreover, we find the deposition temperature is a main factor of element content. In the end, we produce an anti-reflection coating on Ge substrate, and its average transmission reaches 99.5%, which can satisfy the practical requirement. © 2013 Chinese Optics Letters.
英文摘要: YbF3 is proposed as a substitute for ThF4 in anti-reflection or reflection coatings in the infrared (IR) range. In this letter, we study on the properties of the YbF3 thin film deposited with different deposition parameters, and find the deposition rate of YbF3 has a large effect on the substrate particles deposition both on number and area. Moreover, we find the deposition temperature is a main factor of element content. In the end, we produce an anti-reflection coating on Ge substrate, and its average transmission reaches 99.5%, which can satisfy the practical requirement. © 2013 Chinese Optics Letters.
收录类别: SCI ; Ei
语种: 英语
WOS记录号: WOS:000209349900021
ISSN号: 16717694
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/6354
Appears in Collections:自适应光学技术研究室(八室)_期刊论文

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作者单位: Key Laboratory on Adaptive Optics, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China

Recommended Citation:
Zhang, Yaoping,Zhou, Hong,Fan, Junqi,et al. Studies on properties of YbF3 thin film by different deposition parameters[J]. Chinese Optics Letters,2013,11(SUPPL.1):S10215.
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