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题名:
波前功率谱密度评价方法研究
作者: 徐芳
学位类别: 硕士
答辩日期: 2000
授予单位: 中国科学院光电技术研究所
授予地点: 中国科学院光电技术研究所
导师: 魏全忠
关键词: 功率谱密度函数 ; 傅里叶分析 ; 激光数字干涉仪 ; 系统传递函数
中文摘要: 针对高功率激光系统及X射线光学系统中光学元件对中频段波前质量的要求,本文研究了一维波前功率谱密度的评价方法。以傅里叶分析技术为基础,分析光学元件表面的在个频段波前特性不同需要后,讨论了波前功率谱密度的基本理论及经典算法,采用了加窗平均周期图法进行研究分析。本算法包括波前预处理及加窗平均周期图法两大部分。首先针对中频波前研究的特点,为消除相对于研究频率范围(0.12mm
英文摘要: According to the demand of the wave-front quality of the optics used for high power laser system and X-ray optical system, this paper studies the specification of optical components with the power spectral density function. On the basis of Fourier techniques, we analyze feature of the optical component wave-front in three wavebands and discuss the basic concept and classical algorithm of PSD. Then average periods chart method by adding windows is proposed in this paper. The algorithm consists of two parts, one is for wave-front pretreatment and the other is for average periods chart. Firstly, in order to eliminate lower frequency component relative to study scope, this paper describes the adoption of conicoid fitting method to reconstruct two-dimension wave-front, and then modify the baseline for one dimension wave-front using least square fitting. Secondly, through comparing the advantages and disadvantages of various window functions, the window having better frequency response is selected and the mathematics model is proposed. At the same time, in order to ensure accurate measurement of the parts and analyze system error, the test apparatus must be well calibrated. The system transfer function (STF) of the interferometer is calculated by comparing the power spectra value of measurements of a known phase object to their theoretical power spectra value. The experiment prove that interferometer has well frequency response. The experiments demonstrate that the method is effective in evaluating mid frequency error of optical profile with power spectral density, and enlarge the function of the existed interferometer.
语种: 中文
内容类型: 学位论文
URI标识: http://ir.ioe.ac.cn/handle/181551/57
Appears in Collections:光电技术研究所博硕士论文_学位论文

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Recommended Citation:
徐芳. 波前功率谱密度评价方法研究[D]. 中国科学院光电技术研究所. 中国科学院光电技术研究所. 2000.
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