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无掩模激光干涉光刻技术研究
冯伯儒; 张 锦; 宗德蓉
Source Publication微纳电子技术
Volume39Issue:3Pages:39-42
2002
Language中文
ISSN1671-4776
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/482
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding Author冯伯儒
Recommended Citation
GB/T 7714
冯伯儒,张 锦,宗德蓉. 无掩模激光干涉光刻技术研究[J]. 微纳电子技术,2002,39(3):39-42.
APA 冯伯儒,张 锦,&宗德蓉.(2002).无掩模激光干涉光刻技术研究.微纳电子技术,39(3),39-42.
MLA 冯伯儒,et al."无掩模激光干涉光刻技术研究".微纳电子技术 39.3(2002):39-42.
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