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Department开放室
准单色亚稳态氦原子束源系统研究
高洪涛; 陈旭南; 陈元培
Source Publication微细加工技术
Volume20Issue:2Pages:24-27
2002
Language中文
ISSN1003-8213
Indexed ByEI
Document Type期刊论文
Version出版稿
Identifierhttp://ir.ioe.ac.cn/handle/181551/478
Collection微细加工光学技术国家重点实验室(开放室)
Corresponding Author高洪涛
Recommended Citation
GB/T 7714
高洪涛,陈旭南,陈元培. 准单色亚稳态氦原子束源系统研究[J]. 微细加工技术,2002,20(2):24-27.
APA 高洪涛,陈旭南,&陈元培.(2002).准单色亚稳态氦原子束源系统研究.微细加工技术,20(2),24-27.
MLA 高洪涛,et al."准单色亚稳态氦原子束源系统研究".微细加工技术 20.2(2002):24-27.
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