IOE OpenIR  > 光电技术研究所博硕士论文
Thesis Advisor谢传钵
Degree Grantor中国科学院光电技术研究所
Place of Conferral中国科学院光电技术研究所
Keyword相位测量技术 小偏离量非球面 模拟干涉图 波面相差 Zernike多项式拟合
Other AbstractWith the improvement of small-sizing, light-weighting, quality of optical instruments, the application of aspherics is more and more common. Today, designing a aspherics is not so hard by special software (opt.CAD), but its fabricating and testing are very difficult. Testing is the key factor of manufacturing a aspherics. Therefore, studying new method to appraise the shape of aspherical element objectively and accurately, has become a hot point in the optical manufacturing field. On the basis of analysising the characteristics and difficult points of aspherical testing, a new method, aimming at small gradient aspherics of large aperture & small relative aperture, or small aperture & large relative aperture, It extracts phase data from the characteristic interferogram, compares these data with the theoretical ones, then giving the surface error. All the work is done by computer. The functions of the software include: calculating theoretical deviation, drawing computer imitating interferogram, Zernike polynomials fit, analysising wavefront aberration, drawing two(three)-dimensions wavefront plot and contour wave surface map. Finally, a verifying experiment is introduced the results indicate that the mothed is an effective one. The new testing method, aboved-discussed, well solved the highly precision、quantitative testing of small gradient aspherics and its qualitative inspecting in mass production, has laid a solid foundation for its wide application.
Document Type学位论文
Recommended Citation
GB/T 7714
伍文. 计算机辅助干涉仪测量小偏离量光学非球面的方法研究[D]. 中国科学院光电技术研究所. 中国科学院光电技术研究所,2000.
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