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基于TIC64x+内核DSP的H.26z压缩关键模块优化
韩文俊; 张艳艳; 任国强等
Source Publication光电工程
Volume37Issue:3Pages:39-43
2010
Language中文
Subtype期刊论文
Abstract本文分析了离焦量对微透镜列阵成像光刻图形质量的影响,给出了系统离焦量的容差。同时提出了一种结构简单、可应用于微透镜列阵成像光刻系统调焦的新方法。并将基于该调焦方法的实验装置应用于微透镜列阵成像光刻系统,进行了光刻实验。实验表明,利用该方法对微透镜列阵成像光刻系统调焦,可得到接近微透镜列阵极限像质的光刻图形。
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/4325
Collection光电测控技术研究室(三室)
Corresponding Author韩文俊
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
韩文俊,张艳艳,任国强等. 基于TIC64x+内核DSP的H.26z压缩关键模块优化[J]. 光电工程,2010,37(3):39-43.
APA 韩文俊,张艳艳,&任国强等.(2010).基于TIC64x+内核DSP的H.26z压缩关键模块优化.光电工程,37(3),39-43.
MLA 韩文俊,et al."基于TIC64x+内核DSP的H.26z压缩关键模块优化".光电工程 37.3(2010):39-43.
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