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Spherical aberrations and manufacturing errors in eliminating the substrate errors of a computer-generated hologram
Feng, Jie1,2; Deng, Chao1; Xing, Tingwen1
Source PublicationOptical Engineering
Volume52Issue:9Pages:091723
2013
Language英语
ISSN00913286
DOI10.1117/1.OE.52.9.091723
Indexed ByEi
Subtype期刊论文
AbstractComputer-generated holograms (CGH) are widely used in optical testing. CGH fabrication errors caused by the CGH manufacturing processes can lead to errors in the diffraction wavefront. CGH substrate errors affect the testing accuracy significantly among the CGH fabrication errors. An experimental method is discussed for measuring CGH substrate errors. There are two problems in this method: (1) zero-order diffraction light introduces spherical aberrations during the measurement of substrate errors; (2) CGH manufacturing errors introduced by nonuniformities in duty-cycle, etching depth, amplitude affect zero, and nonzero orders differently. These problems are analyzed to optimize the CGH design as well as to achieve better diffraction efficiency and low sensitivity to manufacturing errors. © 2013 Society of Photo-Optical Instrumentation Engineers (SPIE).; Computer-generated holograms (CGH) are widely used in optical testing. CGH fabrication errors caused by the CGH manufacturing processes can lead to errors in the diffraction wavefront. CGH substrate errors affect the testing accuracy significantly among the CGH fabrication errors. An experimental method is discussed for measuring CGH substrate errors. There are two problems in this method: (1) zero-order diffraction light introduces spherical aberrations during the measurement of substrate errors; (2) CGH manufacturing errors introduced by nonuniformities in duty-cycle, etching depth, amplitude affect zero, and nonzero orders differently. These problems are analyzed to optimize the CGH design as well as to achieve better diffraction efficiency and low sensitivity to manufacturing errors. © 2013 Society of Photo-Optical Instrumentation Engineers (SPIE).
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Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/4251
Collection应用光学研究室(二室)
Affiliation1. Chinese Academy of Sciences, Institute of Optics and Electronics, Laboratory of Applied Optics, Chengdu 610209, China
2. University of Chinese Academy of Sciences, Beijing 100049, China
Recommended Citation
GB/T 7714
Feng, Jie,Deng, Chao,Xing, Tingwen. Spherical aberrations and manufacturing errors in eliminating the substrate errors of a computer-generated hologram[J]. Optical Engineering,2013,52(9):091723.
APA Feng, Jie,Deng, Chao,&Xing, Tingwen.(2013).Spherical aberrations and manufacturing errors in eliminating the substrate errors of a computer-generated hologram.Optical Engineering,52(9),091723.
MLA Feng, Jie,et al."Spherical aberrations and manufacturing errors in eliminating the substrate errors of a computer-generated hologram".Optical Engineering 52.9(2013):091723.
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