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二元光学元件横向加工误差对衍射效率的影响
殷可为; 黄智强; 林妩媚; 邢廷文
Source Publication光电工程
Volume38Issue:9Pages:46-49+54
2011
Language中文
Subtype期刊论文
Abstract横向加工误差包括对准误差和线宽误差,加工误差对衍射效率的影响是二元光学元件研究的重要问题。本文基于标量衍射理论,提出了一种与MATLAB相结合的分层计算方法,重点分析了4阶和8阶二元光学元件横向加工误差和衍射效率的关系。结果表明,控制8阶二元光学元件对准误差,可抑制衍射效率的迅速下降,适当调整线宽能够减小对准误差造成的影响。这些结果对二元光学元件的加工有重要的参考价值。该方法简便且适用性强,可对二元光学元件的加工误差进行准确分析。
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/4218
Collection应用光学研究室(二室)
Corresponding Author殷可为
Affiliation中国科学院光电技术研究所
Recommended Citation
GB/T 7714
殷可为,黄智强,林妩媚,等. 二元光学元件横向加工误差对衍射效率的影响[J]. 光电工程,2011,38(9):46-49+54.
APA 殷可为,黄智强,林妩媚,&邢廷文.(2011).二元光学元件横向加工误差对衍射效率的影响.光电工程,38(9),46-49+54.
MLA 殷可为,et al."二元光学元件横向加工误差对衍射效率的影响".光电工程 38.9(2011):46-49+54.
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