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Department四室
底面对准曝光中的对准技术研究
陈兴俊; 胡松; 姚汉民
Source Publication微细加工技术
Volume20Issue:3Pages:36--39
2002
Language中文
ISSN1003-8213
Indexed ByEI
Document Type期刊论文
Version出版稿
Identifierhttp://ir.ioe.ac.cn/handle/181551/417
Collection微电子装备总体研究室(四室)
Corresponding Author陈兴俊
Recommended Citation
GB/T 7714
陈兴俊,胡松,姚汉民. 底面对准曝光中的对准技术研究[J]. 微细加工技术,2002,20(3):36--39.
APA 陈兴俊,胡松,&姚汉民.(2002).底面对准曝光中的对准技术研究.微细加工技术,20(3),36--39.
MLA 陈兴俊,et al."底面对准曝光中的对准技术研究".微细加工技术 20.3(2002):36--39.
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