IOE OpenIR  > 光电技术研究所博硕士论文
Thesis Advisor熊胜明
Degree Grantor中国科学院光电技术研究所
Place of Conferral中国科学院光电技术研究所
Keyword多层膜 总积分散射 散射分布
Other AbstractTheories and measuring system of light scattering for COIL multilayer coatings have been studied in this thesis, in which: The development process of light scattering theories for from single surface to multilayer coatings is reviewed. Scalar scattering theory as well as vector scattering theory is introduced. And the statistic parameters used to describe surface roughness characteristics are introduced. The calculating method of light scattering from multilayer films based on the film's transmitting matrix is studied carefully, then relation between TIS and RMS roughness is given followed by the introduction of TIS measuring setups. Using a perturbation method that is limited to the first order analyzed the distribution of scattered light by multilayer films expressed in BRDF and ARS. Relations among BRDF, ARS, and TIS are also given. A COIL HR-mirror TIS measuring system is built. Design methods and all components are described in detail. The error of the whole system which is which ±10% is analyzed. Scattering mechanism of COIL HR-film is studied using scattering theories of multilayer optics and the measuring system introduced previously. The TIS of COIL HR-film are measured with 0° and 45° light incident. Finally, suggestions for further study on this topic are given.
Document Type学位论文
Recommended Citation
GB/T 7714
潘栋梁. COIL用高反射膜散射特性研究[D]. 中国科学院光电技术研究所. 中国科学院光电技术研究所,2000.
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