We experimentally demonstrate a dynamically tunable terahertz (THz) metamaterial absorber based on an electrostatic microelectromechanical systems (MEMS) actuator and electrical dipole resonator array. The absorption of the THz wave is mainly a result of the electrical dipole resonance, which shows a tunable performance on demand. By preforming the finite integral technique, we discovered that the central absorption frequency and the amplitude can be simultaneously tuned by the applied voltage U. Characterized by a white light interferometer and a THz time domain spectroscopy system, our THz absorber is measured to show a modulation of the central frequency and the amplitude to about 10% and 20%, respectively. The experimental results show good agreement with the simulation. This dynamically tunable absorber has potential applications on THz filters, modulators and controllers.
Natural Science Foundation of Guangxi(2015GXNSFDA19039
; Guangxi Key Laboratory of Automatic Detection Technology and Instrument(YQ14114
; Guilin University of Electronic Technology
; National Natural Science Foundation of China(61265005
1.Guilin Univ Elect Technol, Guangxi Coll & Univ Key Lab Optoelect Informat Pr, Guilin 541004, Peoples R China 2.Oklahoma State Univ, Sch Elect & Comp Engn, Stillwater, OK 74078 USA 3.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China 4.Tianjin Univ, Coll Precis Instrument & Optoelect Engn, Tianjin 300072, Peoples R China 5.Guangxi Expt Ctr Informat Sci, Guilin 541004, Peoples R China
Hu, Fangrong,Xu, Ningning,Wang, Weiming,et al. A dynamically tunable terahertz metamaterial absorber based on an electrostatic MEMS actuator and electrical dipole resonator array[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2016,26(2).