In this paper, all-dielectric subwavelength structures are proposed to construct beam deflectors and lenses that modulate the light fields efficiently. These devices are composed of planar array of silicon pyramids with spatially varying geometric shapes, thereby introducing arbitrary phase shift to the propagating light. Meanwhile, owing to the intrinsic low-reflection property, average reflectance as low as 10% is accomplished. The lenses were rigorously designed in both one-dimensional (1D) and two-dimensional (2D) cases. Due to the symmetry of the unit cell, there is no limitation on the polarization state of the incident light. Since no plasmonic loss is incorporated, this design could meet the requirement of wavefront manipulation for laser beams. (C) 2015 Elsevier B.V. All rights reserved.