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题名:
Nanobowl array fabrication based on nanoimprint lithography
作者: Zhang, Man; Deng, Qiling; Shi, Lifang; Cao, Axiu; Pang, Hui; Hu, Song
刊名: OPTIK
出版日期: 2016
卷号: 127, 期号:1, 页码:145-147
关键词: Nanobowl array ; Self-assembly ; Nanoimprint lithography ; Lift-off
DOI: 10.1016/j.ijleo.2015.10.024
文章类型: Article
英文摘要: This paper presents a fabrication method of nanobowl array by combining polystyrenes spheres (PSs) self-assembly, nanoimprint lithography (NIL), and lift-off process. A self-assembly monolayer of PSs on the quartz wafer is used as the nanoimprint mold. After separating the mold, the residual PSs onto the nanoimprint resist can be lifted off in the hydrofluoric acid solution and the nanobowl array is achieved. The size of the nanobowl can be modulated by the thickness of the nanoimprint resist. Using this method, different size of nanobowl arrays with high-resolution nanogap and nanoholes were fabricated, which has great potential to serve as a reaction container, catalyst and surface enhanced Raman scattering substrate. (C) 2015 Elsevier GmbH. All rights reserved.
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Optics
研究领域[WOS]: Optics
关键词[WOS]: NANOSPHERE LITHOGRAPHY ; SILICON NANOPILLARS ; NANOPARTICLES ; TEMPLATE ; STAMPS ; NICKEL
收录类别: SCI
项目资助者: National Natural Science Foundation of China(11174281 ; 61275061)
语种: 英语
WOS记录号: WOS:000368212200032
ISSN号: 0030-4026
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/3831
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China

Recommended Citation:
Zhang, Man,Deng, Qiling,Shi, Lifang,et al. Nanobowl array fabrication based on nanoimprint lithography[J]. OPTIK,2016,127(1):145-147.
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