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题名:
Fabrication of high aspect ratio (> 100:1) nanopillar array based on thiol-ene
作者: Zhang, Man; Deng, Qiling; Shi, Lifang; Cao, Axiu; Pang, Hui; Hu, Song
刊名: MICROELECTRONIC ENGINEERING
出版日期: 2016-01-05
卷号: 149, 页码:52-56
关键词: Nanopillar array ; High aspect ratio ; Thiol-ene ; AAO template
DOI: 10.1016/j.mee.2015.09.011
文章类型: Article
英文摘要: Nanopillar arrays have attracted considerable attention lately based on confinement effects and large surface to volume ratios. In this study, we demonstrated an efficient low-cost method for fabrication of large-area high aspect ratio nanopillars based on thiol-ene. Anodic aluminum oxide (AAO) template with ordered deep hole array was employed as the master mold. The low-viscosity and highly rigid UV-curable thiol-ene polymer was used as the structure material. The deep holes were filled with the liquid thiol-ene by overcoming the surface tension. Upon curing under UV irradiation, the thiol-ene formed a rigid cross-linked polymer network. The thiol-ene nanopillars were achieved after releasing the AAO mold in the corrosive solution, due to the corrosive-resistance of the cross-linked polymer. Based on the novel method, we fabricated thiol-ene nanopillar array with the diameter of 296 nm and aspect ratio of higher than 100:1. The experimental results demonstrated that the properties of thiol-ene polymer were excellent and the fabrication method was feasible. (C) 2015 Elsevier B.V. All rights reserved.
WOS标题词: Science & Technology ; Technology ; Physical Sciences
类目[WOS]: Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Optics ; Physics, Applied
研究领域[WOS]: Engineering ; Science & Technology - Other Topics ; Optics ; Physics
关键词[WOS]: NANOIMPRINT LITHOGRAPHY NIL ; SILICON NANOPILLARS ; FIELD ; NANOWIRES ; CHEMISTRY ; FEATURES
收录类别: SCI
语种: 英语
WOS记录号: WOS:000367420200010
ISSN号: 0167-9317
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/3791
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China

Recommended Citation:
Zhang, Man,Deng, Qiling,Shi, Lifang,et al. Fabrication of high aspect ratio (> 100:1) nanopillar array based on thiol-ene[J]. MICROELECTRONIC ENGINEERING,2016,149:52-56.
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