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题名:
Fluoride coatings for vacuum ultraviolet reflection filters
作者: Guo, Chun1; Kong, Mingdong1,2; Lin, Dawei1; Li, Bincheng1,3
刊名: APPLIED OPTICS
出版日期: 2015-12-10
卷号: 54, 期号:35, 页码:10498-10503
DOI: 10.1364/AO.54.010498
文章类型: Article
英文摘要: LaF3/MgF2 reflection filters with a high spectral-discrimination capacity of the atomic-oxygen lines at 130.4 and 135.6 nm, which were employed in vacuum ultraviolet imagers, were prepared by molybdenum-boat thermal evaporation. The optical properties of reflection filters were characterized by a high-precision vacuum ultraviolet spectrophotometer. The vulnerability of the filter's microstructures to environmental contamination and the recovery of the optical properties of the stored filter samples with ultraviolet ozone cleaning were experimentally demonstrated. For reflection filters with the optimized nonquarter-wave multilayer structures, the reflectance ratios R-135.6nm/R-130.4nm of 92.7 and 20.6 were achieved for 7 degrees and 45 degrees angles of incidence, respectively. On the contrary, R135.6nm/R130.4nm ratio of 12.4 was obtained for a reflection filter with a standard p-stack multilayer structure with H/L = 1/4 at 7 degrees AOI. (C) 2015 Optical Society of America
WOS标题词: Science & Technology ; Physical Sciences
类目[WOS]: Optics
研究领域[WOS]: Optics
关键词[WOS]: THIN-FILMS ; 193 NM ; BOAT EVAPORATION ; NARROW-BAND ; MICROSTRUCTURE ; MGF2
收录类别: SCI
语种: 英语
WOS记录号: WOS:000366605900029
ISSN号: 1559-128X
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/3783
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: 1.Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100039, Peoples R China
3.Univ Elect Sci & Technol China, Sch Optelect Informat, Chengdu 610054, Peoples R China

Recommended Citation:
Guo, Chun,Kong, Mingdong,Lin, Dawei,et al. Fluoride coatings for vacuum ultraviolet reflection filters[J]. APPLIED OPTICS,2015,54(35):10498-10503.
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