Fabrication of hybrid soft-nanoimprint mold in benign ambient based on thiol-ene

doi:10.1016/j.ijleo.2015.08.030

	Fabrication of hybrid soft-nanoimprint mold in benign ambient based on thiol-ene
	Zhang, Man; Cao, Axiu; Shi, Lifang; Deng, Qiling; Hu, Song
Source Publication	OPTIK
Volume	126 Issue:23 Pages:4123-4126
	2015
Language	英语
ISSN	0030-4026
DOI	10.1016/j.ijleo.2015.08.030
Indexed By	SCI
WOS ID	WOS:000365373400125
Subtype	Article
Abstract	Soft-nanoimprint lithography is a high-throughput and cost-effective lithographic technique with high resolution and low pressure, of which the crucial component is the mold. We demonstrate a method to fabricate hybrid soft-nanoimprint mold in benign ambient based on UV-curable thiol-ene polymer. Because of the special photopolymerization mechanism via "click chemistry", thiol-ene can be cured completely at ambient conditions without inhabitation from oxygen or moisture. The mold can be fabricated in air not in vacuum or a nitrogen atmosphere to simplify the fabrication process and lower the cost. Based on this method, we fabricated a soft-nanoimprint hybrid mold in benign ambient, which is composed of rigid thiol-ene features with sub-60 nm resolution on an elastic poly(dimethylsiloxane) (PDMS) substrate. (C) 2015 Elsevier GmbH. All rights reserved.
Keyword	Soft-nanoimprint Lithography Hybrid Mold Thiol-ene Pdms
WOS Keyword	IMPRINT LITHOGRAPHY ; CLICK CHEMISTRY ; POLY(DIMETHYLSILOXANE) ; RESOLUTION ; SURFACE
WOS Research Area	Optics
WOS Subject	Optics
Citation statistics	Cited Times:2[WOS] [WOS Record] [Related Records in WOS]
Document Type	期刊论文
Identifier	http://ir.ioe.ac.cn/handle/181551/3768
Collection	光电技术研究所被WoS收录文章
Affiliation	Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
Recommended Citation GB/T 7714	Zhang, Man,Cao, Axiu,Shi, Lifang,et al. Fabrication of hybrid soft-nanoimprint mold in benign ambient based on thiol-ene[J]. OPTIK,2015,126(23):4123-4126.
APA	Zhang, Man,Cao, Axiu,Shi, Lifang,Deng, Qiling,&Hu, Song.(2015).Fabrication of hybrid soft-nanoimprint mold in benign ambient based on thiol-ene.OPTIK,126(23),4123-4126.
MLA	Zhang, Man,et al."Fabrication of hybrid soft-nanoimprint mold in benign ambient based on thiol-ene".OPTIK 126.23(2015):4123-4126.

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