IOE OpenIR  > 光电技术研究所被WoS收录文章
Fabrication of hybrid soft-nanoimprint mold in benign ambient based on thiol-ene
Zhang, Man; Cao, Axiu; Shi, Lifang; Deng, Qiling; Hu, Song
Source PublicationOPTIK
Volume126Issue:23Pages:4123-4126
2015
Language英语
ISSN0030-4026
DOI10.1016/j.ijleo.2015.08.030
Indexed BySCI
WOS IDWOS:000365373400125
SubtypeArticle
AbstractSoft-nanoimprint lithography is a high-throughput and cost-effective lithographic technique with high resolution and low pressure, of which the crucial component is the mold. We demonstrate a method to fabricate hybrid soft-nanoimprint mold in benign ambient based on UV-curable thiol-ene polymer. Because of the special photopolymerization mechanism via "click chemistry", thiol-ene can be cured completely at ambient conditions without inhabitation from oxygen or moisture. The mold can be fabricated in air not in vacuum or a nitrogen atmosphere to simplify the fabrication process and lower the cost. Based on this method, we fabricated a soft-nanoimprint hybrid mold in benign ambient, which is composed of rigid thiol-ene features with sub-60 nm resolution on an elastic poly(dimethylsiloxane) (PDMS) substrate. (C) 2015 Elsevier GmbH. All rights reserved.
KeywordSoft-nanoimprint Lithography Hybrid Mold Thiol-ene Pdms
WOS KeywordIMPRINT LITHOGRAPHY ; CLICK CHEMISTRY ; POLY(DIMETHYLSILOXANE) ; RESOLUTION ; SURFACE
WOS Research AreaOptics
WOS SubjectOptics
Citation statistics
Cited Times:2[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/3768
Collection光电技术研究所被WoS收录文章
AffiliationChinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China
Recommended Citation
GB/T 7714
Zhang, Man,Cao, Axiu,Shi, Lifang,et al. Fabrication of hybrid soft-nanoimprint mold in benign ambient based on thiol-ene[J]. OPTIK,2015,126(23):4123-4126.
APA Zhang, Man,Cao, Axiu,Shi, Lifang,Deng, Qiling,&Hu, Song.(2015).Fabrication of hybrid soft-nanoimprint mold in benign ambient based on thiol-ene.OPTIK,126(23),4123-4126.
MLA Zhang, Man,et al."Fabrication of hybrid soft-nanoimprint mold in benign ambient based on thiol-ene".OPTIK 126.23(2015):4123-4126.
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