Knowledge Management System Of Institute of optics and electronics, CAS
Fabrication of hybrid soft-nanoimprint mold in benign ambient based on thiol-ene | |
Zhang, Man; Cao, Axiu; Shi, Lifang; Deng, Qiling; Hu, Song | |
Source Publication | OPTIK
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Volume | 126Issue:23Pages:4123-4126 |
2015 | |
Language | 英语 |
ISSN | 0030-4026 |
DOI | 10.1016/j.ijleo.2015.08.030 |
Indexed By | SCI |
WOS ID | WOS:000365373400125 |
Subtype | Article |
Abstract | Soft-nanoimprint lithography is a high-throughput and cost-effective lithographic technique with high resolution and low pressure, of which the crucial component is the mold. We demonstrate a method to fabricate hybrid soft-nanoimprint mold in benign ambient based on UV-curable thiol-ene polymer. Because of the special photopolymerization mechanism via "click chemistry", thiol-ene can be cured completely at ambient conditions without inhabitation from oxygen or moisture. The mold can be fabricated in air not in vacuum or a nitrogen atmosphere to simplify the fabrication process and lower the cost. Based on this method, we fabricated a soft-nanoimprint hybrid mold in benign ambient, which is composed of rigid thiol-ene features with sub-60 nm resolution on an elastic poly(dimethylsiloxane) (PDMS) substrate. (C) 2015 Elsevier GmbH. All rights reserved. |
Keyword | Soft-nanoimprint Lithography Hybrid Mold Thiol-ene Pdms |
WOS Keyword | IMPRINT LITHOGRAPHY ; CLICK CHEMISTRY ; POLY(DIMETHYLSILOXANE) ; RESOLUTION ; SURFACE |
WOS Research Area | Optics |
WOS Subject | Optics |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.ioe.ac.cn/handle/181551/3768 |
Collection | 光电技术研究所被WoS收录文章 |
Affiliation | Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China |
Recommended Citation GB/T 7714 | Zhang, Man,Cao, Axiu,Shi, Lifang,et al. Fabrication of hybrid soft-nanoimprint mold in benign ambient based on thiol-ene[J]. OPTIK,2015,126(23):4123-4126. |
APA | Zhang, Man,Cao, Axiu,Shi, Lifang,Deng, Qiling,&Hu, Song.(2015).Fabrication of hybrid soft-nanoimprint mold in benign ambient based on thiol-ene.OPTIK,126(23),4123-4126. |
MLA | Zhang, Man,et al."Fabrication of hybrid soft-nanoimprint mold in benign ambient based on thiol-ene".OPTIK 126.23(2015):4123-4126. |
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