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题名:
Forming Sub-32-nm High-Aspect Plasmonic Spot via Bowtie Aperture Combined with Metal-Insulator-Metal Scheme
作者: Wang, Yaohui; Yao, Na; Zhang, Wei; He, Jiayu; Wang, Changtao; Wang, Yanqin; Zhao, Zeyu; Luo, Xiangang
刊名: PLASMONICS
出版日期: 2015-12-01
卷号: 10, 期号:6, 页码:1607-1613
关键词: Nanolithography ; Surface plasmon ; Sub-wavelength structures ; Nanostructure
DOI: 10.1007/s11468-015-9966-6
文章类型: Article
英文摘要: We theoretically utilize bowtie aperture combined with metal-insulator-metal (MIM) scheme to obtain sub-32-nm (lambda/12) high-aspect plasmonic spots. The improvement of the depth profile is attributed to the asymmetry electromagnetic mode excitation in MIM structure and the decaying compensation of the reflective Ag layer. A theoretical near-field exposure model has been used to evaluate the exposure depth in the photoresist. It is demonstrated that the exposure depth of the sub-32-nm plasmonic spot is more than 20 nm, which is about four times of the bowtie aperture without MIM scheme. The influences of the air gap tolerance and the ridge gap size of bowtie aperture are also discussed.
WOS标题词: Science & Technology ; Physical Sciences ; Technology
类目[WOS]: Chemistry, Physical ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary
研究领域[WOS]: Chemistry ; Science & Technology - Other Topics ; Materials Science
关键词[WOS]: OFF-AXIS ILLUMINATION ; NEAR-FIELD ; NANOLITHOGRAPHY ; LITHOGRAPHY ; ANTENNAS ; LENS
收录类别: SCI
项目资助者: 973 Program of China(2013CBA01700) ; National Natural Science Funds(61138002 ; 61177013)
语种: 英语
WOS记录号: WOS:000364966300046
ISSN号: 1557-1955
Citation statistics:
内容类型: 期刊论文
URI标识: http://ir.ioe.ac.cn/handle/181551/3766
Appears in Collections:光电技术研究所被WoS收录文章_期刊论文

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作者单位: Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Nanofabricat & Microeng, Chengdu 610209, Peoples R China

Recommended Citation:
Wang, Yaohui,Yao, Na,Zhang, Wei,et al. Forming Sub-32-nm High-Aspect Plasmonic Spot via Bowtie Aperture Combined with Metal-Insulator-Metal Scheme[J]. PLASMONICS,2015,10(6):1607-1613.
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