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Design of MEMS-based micro-filter integrating grating and tunable Fabry-Perot cavity
Shi, Zhendong1,2; Fang, Liang1; Zhou, Chongxi1
Source PublicationINTERNATIONAL JOURNAL OF NANOTECHNOLOGY
Volume12Issue:10-12Pages:829-837
2015
Language英语
ISSN1475-7435
DOI10.1504/IJNT.2015.071794
Indexed BySCI
WOS IDWOS:000364812400010
SubtypeArticle
AbstractThis paper presents basic designs and operation concepts of a novel micro-electro-mechanical-systems (MEMS) filter integrating a tunable Fabry-Perot (FP) cavity and a grating. It is based on the filtering effect of the tunable FP cavity and the spatial separation function of the grating for the different wavelengths. The combination of two devices could widen the spectral range of the traditional FP filter without affecting its spectral linewidth. A MEMS filter configuration based on the silicon-glass bonded structure has been designed. The FP cavity length depends on the thickness of the silicon wafer itself to realise the long cavity length. The T-S cantilevers could decrease the micromirror deformation, and reduce the driving voltage appropriately. Calculational results indicate that narrow linewidth and wide spectral range could be obtained simultaneously at the long cavity length.
KeywordIntegrated Optics Devices Micro-electro-mechanical-systems Filters Gratings
WOS KeywordINTERFEROMETER ; FABRICATION
WOS Research AreaScience & Technology - Other Topics ; Materials Science
WOS SubjectNanoscience & Nanotechnology ; Materials Science, Multidisciplinary
Citation statistics
Cited Times:1[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.ioe.ac.cn/handle/181551/3760
Collection光电技术研究所被WoS收录文章
Affiliation1.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Nanofabricat & Microeng, Chengdu 610209, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
Recommended Citation
GB/T 7714
Shi, Zhendong,Fang, Liang,Zhou, Chongxi. Design of MEMS-based micro-filter integrating grating and tunable Fabry-Perot cavity[J]. INTERNATIONAL JOURNAL OF NANOTECHNOLOGY,2015,12(10-12):829-837.
APA Shi, Zhendong,Fang, Liang,&Zhou, Chongxi.(2015).Design of MEMS-based micro-filter integrating grating and tunable Fabry-Perot cavity.INTERNATIONAL JOURNAL OF NANOTECHNOLOGY,12(10-12),829-837.
MLA Shi, Zhendong,et al."Design of MEMS-based micro-filter integrating grating and tunable Fabry-Perot cavity".INTERNATIONAL JOURNAL OF NANOTECHNOLOGY 12.10-12(2015):829-837.
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